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Thin film transistor and display panel

A technology of thin film transistor and polysilicon layer, which is applied in transistors, semiconductor devices, electric solid devices, etc., can solve the problems of complicated manufacturing process and achieve the effect of reducing off-current

Inactive Publication Date: 2019-11-12
SAKAI DISPLAY PROD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, when TFTs with different structures are formed on one substrate, the manufacturing process becomes complicated

Method used

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  • Thin film transistor and display panel
  • Thin film transistor and display panel
  • Thin film transistor and display panel

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Embodiment Construction

[0044] Hereinafter, the present invention will be described based on drawings showing embodiments of the present invention. figure 1 is a schematic plan view of the main part of the first example showing the structure of the thin film transistor of the present embodiment, figure 2 is from figure 1 The sectional schematic diagram of the main part of the II-II line observation, image 3 is from figure 1 Schematic cross-sectional view of the main part of the III-III line observation. Such as figure 2 , image 3 As shown, a thin film transistor (TFT: Thin Film Transistor, thin film transistor; also referred to as TFT substrate) has a gate electrode 2 formed on the surface of a glass substrate 1 (also referred to as a substrate), and a gate insulating film 3 (such as , SiO2 film, SiO2 / SiN film stack, SiN film, SiON film, etc.) cover the gate electrode 2.

[0045] In addition, if Figure 1 ~ Figure 3 As shown, on the surface of the gate insulating film 3 on the upper side o...

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Abstract

Provided are a thin film transistor capable of reducing off-state current and a display panel having the thin film transistor. The thin film transistor comprises: a gate electrode (2) formed on the surface of the substrate (1); a polysilicon layer (5) formed on the upper side of the gate electrode; an amorphous silicon layer (4, 6) formed to cover Above-mentioned polysilicon layer; n+ silicon layer (7), is formed on the upper side of above-mentioned amorphous silicon layer; And source electrode (8) and drain electrode (9) are formed on above-mentioned n+ silicon layer; Above-mentioned polysilicon layer, In a projected state where the source electrode and the drain electrode are projected on the surface of the substrate, a part of the polysilicon layer overlaps with a part of the source electrode and a drain electrode, and is positioned on the source electrode and the drain electrode in the projected state. In the polysilicon layer between the electrodes, the minimum dimension in the width direction perpendicular to the length direction between the source electrode and the drain electrode is smaller than the width direction dimension of the source electrode and the drain electrode.

Description

technical field [0001] The invention relates to a thin film transistor and a display panel with the thin film transistor. Background technique [0002] TFT (Thin Film Transistor: Thin Film Transistor) liquid crystal display is bonded by setting a required gap between the TFT substrate and the color filter substrate with R (red), G (green), and B (blue), and attaching it to the Liquid crystal is injected between the TFT substrate and the color filter substrate, and the light transmittance of the liquid crystal molecules of each pixel is adjusted to display images. [0003] In the TFT substrate, the data lines and the scanning lines are arranged in a grid pattern along the horizontal and vertical directions, and pixels composed of TFTs are formed at the intersections of the data lines and the scanning lines. In addition, a driver circuit made of TFTs for driving the data lines and the scanning lines is formed around a display area made up of a plurality of pixels. [0004] A...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L29/786H01L21/336
CPCH01L29/66765H01L29/7866H01L29/78696H01L27/1222H01L29/78669
Inventor 野寺伸武石田茂高仓良平松岛吉明松本隆夫小林和树桶谷大亥
Owner SAKAI DISPLAY PROD
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