XYZ three-freedom-degree precise positioning device

Abstract

An XYZ three-freedom-degree precise positioning device comprises an XY motion base and a Z axis motion module; the Z axis motion module is mounted on the XY motion base, and the XY motion base comprises a base plate; displacement devices and a motion platform are arranged on the base plate, two displacement devices are located on the X axis and the Y axis correspondingly, and are flexible mechanisms with piezoelectric ceramics, and each displacement device comprises a left lever, a right lever, an input end mounting block and an output end mounting block, first containing grooves are formed in the base plate, the displacement devices are mounted in the first containing grooves, the lower ends of the left levers and the lower ends of the right levers are hinged to the lower groove walls of the first containing grooves through hinges, the input end mounting blocks are hinged to the lower portions of the right sides of the left levers and the lower portions of the left sides of the right levers through hinges, the output end mounting blocks are hinged to the upper portions of the right sides of the left levers and the upper portions of the left sides of the right levers through straight beam type flexible hinges, and the output end mounting blocks are mounted on the motion platform through the straight beam type flexible hinges.

Description

technical field [0001] The invention relates to the field of micro-nano technology, in particular to an XYZ three-degree-of-freedom precision positioning device. Background technique [0002] With the increasing development of science and technology and the continuous improvement of nanotechnology, in order to pursue a good quality of life, many fields put forward higher requirements for micro-nano-level positioning platforms. For example, ultra-precision manufacturing, 3D printing, biological cell engineering, chip lithography machines and wire sewing machines all have high precision and dimension requirements for micro-nano platforms. [0003] Based on the principle of three-stage differential lever amplification, a flexible mechanical displacement amplifier with millimeter-level travel and nanometer-level precision is designed. The current three-dimensional platform has the following disadvantages; there is kinematic coupling in the three directions of XYZ, especially in ...

AI Technical Summary

Problems solved by technology

[0003] Based on the principle of three-stage differential lever amplification, a flexible mechanical displacement amplifier with millimeter-level travel and nanometer-level precision is designed. The current three-dimensional platform has the following disadvantages; there is kinematic coupling in the three directions of XYZ, especially in the case of high speed and high acceleration. The swing phenomenon in the Z-axis direction is obvious, and the structure is complex and difficult to assemble.

Images