Graphite boat pushing mechanism used for PECVD device
A graphite boat and equipment technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problems of graphite boat 100 lifting, towing, low height, etc., to overcome size limitations and avoid positioning Inaccurate, avoid the effect of damage
Active Publication Date: 2017-05-31
HUNAN RED SUN PHOTOELECTRICITY SCI & TECH
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Problems solved by technology
As the use time increases, the boat push rod 200 will be deformed, and the middle section of the push boat rod 200 cannot effectively lift the graphite boat 100. When pulling the boat, the graphite boat 100 cannot be effectively pulled because the height of the boat pull block 500 is too low. Will cross the pull boat block 500, resulting in the pull boat phenomenon
In addition, because the height of the existing boat pulling block 500 is too low, the offset of the position of the graphite boat 100 on the boat pushing rod 200 cannot be calibrated. 100 pick-and-place position deviation, the graphite boat 100 is easily smashed and crushed when the manipulator picks up the graphite boat 100, thus damaging the graphite boat 100
Method used
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[0027] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0028] Such as Figure 6 to Figure 11 As shown, the graphite boat pusher mechanism for PECVD equipment in this embodiment includes a pusher boat 300 and a pair of pusher rod assemblies 1 arranged on the pusher boat 300, and each pusher rod assembly 1 is away from one end of the pusher boat 300 A rotary boat pulling block 2 is provided, and the push boat 300 is provided with a drive assembly 3 for driving the rotary boat pull block 2 to rotate, and the drive assembly 3 is connected with the push boat rod assembly 1 . The graphite boat pushing mechanism for PECVD equipment is provided with a rotating boat pulling block 2 on each pushing boat rod assembly 1, and the rotating boat pulling block 2 is driven to rotate by the driving assembly 3, and the pushing boat rod assembly 1 needs to be worn When passing the graphite boat 100, rotate ...
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The invention discloses a graphite boat pushing mechanism used for a PECVD device. The graphite boat pushing mechanism comprises a boat pushing part and a pair of boat pushing rod assemblies arranged on the boat pushing part; rotating type boat pulling blocks are arranged at the ends, away from the boat pushing part, of the boat pushing rod assemblies, a drive assembly used for driving the rotating type boat pulling blocks is arranged on the boat pushing part, and the drive assembly is connected with the boat pushing rod assemblies. The mechanism has the beneficial effects that the structure is simple, the mechanism can smoothly enter the bottom of the graphite boat, and the boat can be reliably pulled.
Description
technical field [0001] The invention relates to photovoltaic equipment, in particular to a graphite boat pushing mechanism for PECVD equipment. Background technique [0002] PECVD equipment (PECVD is the abbreviation of Plasma Enhanced Chemical Vapor Deposition, also known as plasma enhanced chemical vapor deposition method) is an indispensable equipment in the field of photovoltaic manufacturing. In recent years, with the rapid development of my country's photovoltaic industry, automation and intelligence Manufacturing has become a trend, and the automated production of PECVD is a very important part of it. [0003] as attached Figure 1 to Figure 5 As shown, graphite boat 100 (a graphite platform loaded with solar cells, similar in shape to a dragon boat) is placed on a pair of push boat rods 200 by a manipulator, and then push boat 300 (used to carry push boat rods 200 and graphite boat 100) Mechanism) sends the graphite boat 100 into the quartz tube 400 to carry out the ...
Claims
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IPC IPC(8): C23C16/50
CPCC23C16/50
Inventor 肖洁李斌曹明旺
Owner HUNAN RED SUN PHOTOELECTRICITY SCI & TECH