Method for preparing multilevel structure with compound period through variable angle exposure and application

A compound cycle and angle-changing technology, which is applied in microlithography exposure equipment, photomechanical equipment, and photolithography exposure equipment, etc., can solve the problems of low yield, limited scale difference, cumbersome steps, etc., and achieve high efficiency.

Active Publication Date: 2017-05-31
JILIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above-mentioned existing technologies for preparing multi-level structures generally have cumbersome steps and low yields, and the control of scale differences between levels is very limited.

Method used

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  • Method for preparing multilevel structure with compound period through variable angle exposure and application
  • Method for preparing multilevel structure with compound period through variable angle exposure and application
  • Method for preparing multilevel structure with compound period through variable angle exposure and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Fabrication of multilevel structures with recombination periods using variable-angle exposure.

[0033] Based on the principle of double-beam interference technology, the period and scale of each level of the exposed multi-level structure are determined by the exposure angle of the two laser beams. The specific value is given by the formula given. Therefore, as long as the exposure angle is selected according to the specific multi-level structure design, that is, according to the scale of each level structure, the multi-level structure can be obtained by sequentially exposing the sample.

[0034] The method for processing a multi-level structure with a composite period by using variable-angle exposure, the specific steps are as follows:

[0035] (1) Construction and debugging of laser optical path: the laser optical path used is a double-beam interference optical path, and the light source used is a continuous laser with a wavelength of 355nm; The optical path of "be...

Embodiment 2

[0042] The multi-level structure with recombination period was prepared by variable-angle exposure and applied to surface wettability control.

[0043] The introduction of micro-nanostructures on the surface of hydrophobic materials can improve the hydrophobicity of the material surface. Experiments have shown that the introduction of only a single micron or nanostructure has very limited improvement in hydrophobicity, and superhydrophobicity is often not achieved (the contact angle is required to be greater than 150°). Accordingly, the present invention can easily obtain a multi-level micro-nano structure with superhydrophobicity by utilizing the preparation method of variable-angle exposure.

[0044] The multi-level structure with recombination period prepared by variable-angle exposure is applied to the control of surface wettability. The specific method is as follows:

[0045] (1) Construction and debugging of laser optical path: The laser optical path used is a double-be...

Embodiment 3

[0051] Fabrication of multilevel structures with recombination periods by variable-angle exposure for structural color bionics.

[0052] The wings of butterflies and moths often have colorful colors called structural colors. This structural color comes from the diffraction of light by the complex periodic surface microstructures on the surface of such insect wings. Imitating the surface microstructure of butterfly wings, the multi-level structure of compound period prepared by variable-angle exposure can accurately simulate this biological structural color.

[0053] Using variable angle exposure to prepare a multi-level structure with a recombination period is applied to structural color bionics. The specific method is as follows:

[0054] (1) Construction and debugging of laser optical path: The laser optical path used is a double-beam interference optical path, and the light source used is a pulsed laser with a wavelength of 266nm; The optical path of "beam expansion-equal...

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Abstract

The invention discloses a method for preparing a multilevel structure with a compound period through variable angle exposure and application, belongs to the technical field of laser processing, and particularly relates to preparation of a micrometer-nanometer cross-scale multilevel structure with a compound period through double-beam interference. The compound period and the multilevel micrometer-nanometer structure are obtained at the same time through the changing of exposure angles of double-beam interference, and a super-hydrophobic surface and a structural color for imitating insect wings are obtained through the micrometer-nanometer cross-scale multilevel structure and the compound period. According to the method, the multilevel structure is obtained through only double-beam interference processing technology by adopting variable angle exposure, the limitation that the prior art is required to be combined with a plurality of methods to prepare the multilevel structure is broken, and the method has the advantages of high expansibility, high yield, high efficiency and the like.

Description

technical field [0001] The invention belongs to the technical field of laser processing, and specifically relates to the preparation of a micro-nano cross-scale multilevel structure with a composite period by using double-beam interference. The composite period and multi-level micro-nano structure can be simultaneously obtained by changing the exposure angle of the double-beam interference during the preparation process. structure, in order to realize the application of structural color biomimetic and surface wettability regulation. [0002] technical background [0003] In the field of micro-nano processing, multi-level structure generally refers to a hierarchical structure composed of micro- and nano-structures of different scales. The functionality of the multi-level structure mainly depends on the scale difference between the levels, that is, the greater the scale difference between different levels of structures, the more prominent the functionality; accordingly, such st...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70408G03F7/7055
Inventor 孙洪波王磊陈岐岱
Owner JILIN UNIV
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