Extensile island-bridge structure preparation method based on electric fluid spray printing technology

An electrofluidic and electrojet printing technology, which is applied in the manufacture of semiconductor/solid-state devices, circuits, electrical components, etc., can solve the problems of complex preparation process, warpage outside the micro-bridge surface, and low efficiency, and achieve simple process, Improve adaptability and high efficiency

Active Publication Date: 2017-06-13
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the above-mentioned preparation process is complicated, the efficiency is low, and the microbridge is prone to out-of-plane warping.

Method used

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  • Extensile island-bridge structure preparation method based on electric fluid spray printing technology
  • Extensile island-bridge structure preparation method based on electric fluid spray printing technology
  • Extensile island-bridge structure preparation method based on electric fluid spray printing technology

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] Example 1: A silver island bridge structure was prepared based on electro-fluid jet printing technology, as shown in Figure 3(a).

[0058] A: Select a clean and fresh elastic PDMS substrate of 40mm×40mm, stretch the PDMS substrate biaxially by 30%, and fix it on the surface of the stainless steel substrate.

[0059] B: Equipped with high-viscosity silver solution, inject it into a syringe, the size of the syringe is 1ml, use a dispensing needle with an inner diameter of 60um as the printing nozzle, squeeze a little of the solution in the syringe from the needle, and then squeeze the solution. During the process, the air inside the needle was expelled to avoid air bubbles. Clamp the syringe after the above steps are completed.

[0060] C: Adsorb the above-mentioned stainless steel substrate on the motion platform. Adjust the distance between the nozzle and the substrate to 300um~600um, adjust the flow rate to 1000nl / min~2000nl / min, start the voltage, the bias of the vo...

Embodiment 2

[0063] Example 2: A curved island bridge structure was prepared based on electro-fluid jet printing technology, as shown in Figure 3(b).

[0064] A: Pour the ECOFLEX solution into a curved mold, then heat the ECOFLEX solution to solidify, and then remove it from the curved mold to obtain a curved elastic ECOFLEX substrate.

[0065] B: Select a clean and fresh curved elastic ECOFLEX substrate, stretch it from all sides, stretch the curved substrate to a flat surface, and fix it on the surface of the stainless steel base.

[0066] C: Equipped with a high-viscosity silver solution, inject it into a syringe, the size of the syringe is 1ml, use a dispensing needle with an inner diameter of 60um as the printing nozzle, squeeze a little of the solution in the syringe from the needle, and squeeze the solution. During the process, the air inside the needle was expelled to avoid air bubbles. Clamp the syringe after the above steps are completed.

[0067] D: Adsorb the above stainless ...

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Abstract

The invention discloses an extensile island-bridge structure preparation method based on an electric fluid spray printing technology. According to the method, firstly, a flexible substrate is prestreched, then, an electric fluid spray printing process is used for printing patterns on the substrate, according to the electric fluid spray sprinting process, a high voltage alternating current needs to be applied between a nozzle and the substrate, after an solution is sprayed from the nozzle, an island-bridge structure is directly deposited on the prestretched substrate by the solution, wherein the diameter range of an island is 10-200 micrometers, the width range of the bridge is 200-30 micrometers, then, substrate prestrain is released, island morphology is basically not changed, a microbridge is buckled by compression, and the extensile island-bridge structure is formed. The extensile island-bridge structure preparation method has the advantages of being simple in process, low in cost, capable of achieving large-area and array preparation and the like, and has a wide application prospect in the flexible / extensile electronic field.

Description

technical field [0001] The invention relates to the technical field of flexible electronic manufacturing, and more particularly, to a method for preparing a stretchable island bridge structure based on electro-fluid jet printing technology, which can avoid out-of-plane warpage of the manufactured micro-bridge and improve the efficiency of the preparation process. and precision. Background technique [0002] As the most challenging flexible electronic devices, malleable and flexible electronics not only can achieve bending deformation, but also have large tensile and torsional deformation ability and local large strain, and have small scale, strong deformation ability, and large ductility. Features. Scalable and flexible electronic devices have broad application prospects in the fields of information, medical, energy, and national defense. Typical applications include large-area sensors, flexible displays, and printed RFID. [0003] The core of extensible and flexible elect...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/48
Inventor 黄永安段永青钟瑞徐洲龙尹周平
Owner HUAZHONG UNIV OF SCI & TECH
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