Multispectral chip based on meta-surface narrow-band filtering and preparation method thereof

Abstract

The invention provides a multispectral chip based on meta-surface narrow-band filtering. The chip comprises an area array image sensor and a meta-surface structure light filter array. The meta-surface structure light filter array comprises two nanometer film passivation layers and a metal nanopore periodic array structure located between the two nanometer film passivation layers. The meta-surface structure light filter array is located on the area array image sensor. The metal nanopore periodic array structure comprises a metal dielectric film layer. The metal dielectric film layer is provided with periodic nanopore arrays of different sizes. The periodic nanopore nanometer structure arrays of different sizes are prepared on the metal dielectric film layer of the same thickness, and narrow-band filtering of the target image on the multispectral coverage is achieved. The multispectral chip is applicable to finer atlas information collection, the metal nanometer periodic structure is prepared on the surface of the image sensor, the area array multispectral chip is achieved, the chip is easy to obtain technologically, and the wide application range is achieved.

Description

technical field [0001] The present invention relates to a multi-spectral chip based on metasurface narrow-band filtering, in particular to a spectral chip based on metal nanostructure surface plasmon resonance and surface plasmon localized enhanced transmission effect narrow-band filtering and its realization technology . Background technique [0002] The metasurface narrowband filter is an interference filter based on the metal nanostructure surface plasmon resonance and the surface plasmon localization enhanced transmission effect, that is, changing the size and period of the metal nanostructure array on a single plane to adjust Its filtering properties, and then realize the fine wavelength selection of the spectrum of the target image, and accurately capture the spectral curve of the target spectral texture, so as to obtain valuable object attribute information. As a commonly used image sensor, the spectral chip is widely used in scientific research fields such as materi...

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Problems solved by technology

Both filter designs use the principle of multi-beam interference filtering. When multi-spectral filtering is to be achieved, a specific film thickness or film number needs to b

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