Patents
Literature
Patsnap Copilot is an intelligent assistant for R&D personnel, combined with Patent DNA, to facilitate innovative research.
Patsnap Copilot

74 results about "Periodic nanostructures" patented technology

Method for preparing periodic nanostructure with high aspect ratio

The invention discloses a method for preparing a periodic nanostructure with high aspect ratio. The method is characterized by comprising the following steps of: selecting a polished substrate; coating a layer of photoresist with the thickness of greater than or equal to 300 nm on the surface of the polished substrate by a spin-coating method; depositing a SiO2 film with the thickness of 20 nm on the surface of the photoresist by a magnetron sputtering method; coating a layer of high-resolution photoresist with the thickness of 50 to 100 nm on the surface of the SiO2 film by the spin-coating method; exposing and developing the surface high-resolution photoresist by utilizing laser interference photolithography; hardening the three-layer adhesive structure in a heating plate or a baking oven; selecting a fluorine-base gas; transferring a surface photoresist pattern to the SiO2 layer by utilizing reactive ion etching; selecting and using oxygen; taking the SiO2 layer as a hard mask layer; and transferring a pattern on the SiO2 layer to the bottom photoresist by utilizing the reactive ion etching to obtain a photoresist pattern with high resolution and high aspect ratio. The method has low cost, large area of processed pattern area, and a broad application prospect in the aspects of the manufacturing and the application research of sub-wavelength gratings and photonic crystals.
Owner:INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products