74 results about "Periodic nanostructures" patented technology

To make high quality long-range periodic nanostructures in a transparent or semi-transparent substrate, the transparent or semi-transparent substrate is scanned with a linearly polarized laser beam generated by a femtosecond laser and exceeding a predetermined energy / pulse threshold along a scanning path. Sub-diffraction limit structures are formed as periodic planes of modified material in the transparent or semi-transparent substrate extending along the scanning path. The modified material can then be chemically etched to form cavities.

Methods to pattern substrates with dense periodic nanostructures that combine top-down lithographic tools and self-assembling block copolymer materials are provided. According to various embodiments, the methods involve chemically patterning a substrate, depositing a block copolymer film on the chemically patterned imaging layer, and allowing the block copolymer to self-assemble in the presence of the chemically patterned substrate, thereby producing a pattern in the block copolymer film that is improved over the substrate pattern in terms feature size, shape, and uniformity, as well as regular spacing between arrays of features and between the features within each array compared to the substrate pattern. In certain embodiments, the density and total number of pattern features in the block copolymer film is also increased. High density and quality nanoimprint templates and other nanopatterned structures are also provided.

The invention provides a class of copolymers having useful properties, including brush block copolymers, wedge-type block copolymers and hybrid wedge and polymer block copolymers. In an embodiment, for example, block copolymers of the invention incorporate chemically different blocks comprising polymer size chain groups and / or wedge groups that significantly inhibit chain entanglement, thereby enhancing molecular self-assembly processes for generating a range of supramolecular structures, such as periodic nanostructures and microstructures. The present invention also provides useful methods of making and using copolymers, including block copolymers.

The invention provides a multispectral chip based on meta-surface narrow-band filtering. The chip comprises an area array image sensor and a meta-surface structure light filter array. The meta-surface structure light filter array comprises two nanometer film passivation layers and a metal nanopore periodic array structure located between the two nanometer film passivation layers. The meta-surface structure light filter array is located on the area array image sensor. The metal nanopore periodic array structure comprises a metal dielectric film layer. The metal dielectric film layer is provided with periodic nanopore arrays of different sizes. The periodic nanopore nanometer structure arrays of different sizes are prepared on the metal dielectric film layer of the same thickness, and narrow-band filtering of the target image on the multispectral coverage is achieved. The multispectral chip is applicable to finer atlas information collection, the metal nanometer periodic structure is prepared on the surface of the image sensor, the area array multispectral chip is achieved, the chip is easy to obtain technologically, and the wide application range is achieved.

The invention relates to a preparation method of nanostructured array chip with surface plasma for resonance imaging. The preparation method is characterized by comprising the following steps: (1) selecting and cleaning a substrate; (2) using a vacuum evaporated coating to coat a first metal film on the substrate; (3) self-assembling a layer of polystyrene nanoparticles on the metal film; (4) coating a second metal film in a way of evaporation on the self-assembled layer so as to fill the gas between balls; (5) eliminating the nanoparticles with the Lift off technology; (6) using laser direct writing machine to manufacture a lattice mask plate of the level of micron; (7) adopting the photolithography to transmit the mask figure to the substrate; (8) acquiring the lattice figure through developing and stripping of photoresist; (9) using a chemical method to eliminate the excessive metal and photoresist; thus the metal lattice chip of the cyclical nanostructure can be formed. The method adopts the polystyrene nanoparticles for self-assembly so as to prepare the cyclical nanostructure, and thus is suitable for massive production of the nanostructure.

The invention provides a class of block copolymers having a plurality of chemically different blocks, at least a portion of which incorporating polymer side chain groups having a helical secondary structure. The invention also provides structures generated by self-assembly of polymer blends including at least one block copolymer component, such as a brush block polymer or wedge-type block polymer. The invention provides, for example, periodic nanostructures and microstructures generated by self-assembly of block copolymers and polymer blends comprising a mixture of at least one block copolymer component, such as a brush block copolymer, and at least a second component.

The invention relates to a method for preparing a high depth-diameter-ratio three-dimensional micro-channel through electronic dynamic control, and belongs to the technical field of femtosecond laser applying. The time domain shaping is carried out on a femtosecond laser, the partial instant electronic dynamic condition ( especially the freedom electron density distribution), of a modified area is regulated and controlled, the appearance of a periodicity nanometer structure of the modified area is affected, the high depth-diameter-ratio three-dimensional micro-channel irrelative to polarization can be achieved, and compared with a traditional femtosecond laser machining method, the method has the advantage that the depth-diameter-ratio can be multiply increased during the three-dimensional micro-channel machining.

The invention discloses an organic light emitting diode (OLED) display panel, a preparation method thereof and a display device. The organic light emitting diode display panel comprises a white organic light-emitting diode and a metal color filter of a period nanostructure. By arranging a layer of the metal color filter of the period nanostructure to be integrated with a backlight source of the white organic light-emitting diode, a color OLED display structure can be achieved. Compared with the conventional OLED color display structure, the organic light emitting diode display panel provided by an embodiment of the invention only uses one manufacturing process to form the metal color filter. Compared with that a RGB color film layer by more than once evaporation technology in the prior art, the invention can reduce the mask number, simplify the manufacturing technology of the OLED display panel and reduce the production cost. In addition, the metal color filter of the period nanostructure is used for facilitating development of high-resolution products.

This invention addresses the scalability problem of periodic “nanostructured” surface treatments such as those formed by interference lithography. A novel but simple method is described that achieves seamless stitching of nanostructure surface textures at the pattern exposure level. The described tiling approach will enable scaling up of coherent nanostructured surfaces to arbitrary area sizes. Such a large form factor nanotechnology will be essential for fabricating large aperture, coherent diffractive elements. Other applications include high performance, antiglare / antireflection and smudge resistant Motheye treatments for display products such as PDA's, laptop computers, large screen TV's, cockpit canopies, instrument panels, missile and targeting domes, and, more recently, “negative-index” surfaces. Although ideal for seamless stitching of nanometer scale patterns, the technology is broadly applicable to any situation where an arbitrarily large area needs to be seamlessly tiled with a smaller base pattern that has periodic overlap able boundaries.

The invention provides a class of wedge-type block copolymers having a plurality of chemically different blocks, at least a portion of which incorporates a wedge group-containing block providing useful properties. For example, use of one or more wedge group-containing blocks in some block copolymers of the invention significantly inhibits chain entanglement and, thus, the present block copolymers materials provide a class of polymer materials capable of efficient molecular self-assembly to generate a range of structures, such as periodic nanostructures and microstructures. Materials of the present invention include copolymers having one or more wedge group-containing blocks, and optionally for some applications copolymers also incorporating one or more polymer side group-containing blocks. The present invention also provides useful methods of making and using wedge-type block copolymers.

The invention relates to a microwave absorption material with a periodic nanometer structure and a preparation method thereof. A wave absorber of the microwave absorption material with the periodic nanometer structure is filled around the inner walls of holes of a substrate, and the middle parts of the holes of the substrate have hollow structures. The preparation method comprises the following steps: preparing a sol precursor; and then preparing a porous template with a periodic nano-hole structure, dipping the porous template into sol precursor solution, performing oil-bath heating to a temperature of between 80 and 160 DEG C for 1 to 5 hours under the protection of nitrogen, taking out the template for drying, then annealing at a temperature of between 300 and 800 DEG C for 1 to 20 hours under the protection of the nitrogen, and finally obtaining the microwave absorption material with the periodic nanometer structure. The microwave absorption material has the advantages of small density, relatively lighter weight, and relatively better wave-absorbing effectiveness, and has absorption characteristics of narrow frequency and high efficiency.

This invention presents a method for the fabrication of periodic nanostructures on polymeric surfaces by means of plasma processing, which method comprises the following steps:(i) provision of a homogeneous organic polymer (such as PMMA, or PET, or PEEK, or PS, or PE, or COC) or inorganic polymer (such as PDMS or ORMOCER);(ii) exposure of the polymer to an etching plasma such as oxygen (O2) or sulphur hexafluoride (SF6) or a mixture of oxygen (O2) and sulphur hexafluoride (SF6), or mixtures of etching gases with inert gases such as any Noble gas (Ar, He, Ne, Xe).

The present invention relates to an anodized aluminum oxide template that is used to grow periodic nanostructure and method of fabrication of the said template. The invention further relates to the fabrication of the respective periodic nanostructures from diverse materials using hydrothermal and / or CVD method for growing the said nanostructure. The AAO template enabled nanostructure comprises of a substrate disposed on the top of the AAO template; seed / s disposed in the nano-channels / nanopores of the AAO; nanostructures that are grown from respective nano-channels to form substantially uniform distribution / near periodic structure.

The invention provides a surface-enhanced Raman scattering substrate and a trace detection method of a biological and chemical analyte using the same. The substrate includes: a substrate having a periodic nanostructure; a reflection layer formed on the substrate; a dielectric layer formed on the reflection layer; and a metal thin film layer formed on the dielectric layer.

The invention discloses a method for preparing a periodic nanostructure with high aspect ratio. The method is characterized by comprising the following steps of: selecting a polished substrate; coating a layer of photoresist with the thickness of greater than or equal to 300 nm on the surface of the polished substrate by a spin-coating method; depositing a SiO2 film with the thickness of 20 nm on the surface of the photoresist by a magnetron sputtering method; coating a layer of high-resolution photoresist with the thickness of 50 to 100 nm on the surface of the SiO2 film by the spin-coating method; exposing and developing the surface high-resolution photoresist by utilizing laser interference photolithography; hardening the three-layer adhesive structure in a heating plate or a baking oven; selecting a fluorine-base gas; transferring a surface photoresist pattern to the SiO2 layer by utilizing reactive ion etching; selecting and using oxygen; taking the SiO2 layer as a hard mask layer; and transferring a pattern on the SiO2 layer to the bottom photoresist by utilizing the reactive ion etching to obtain a photoresist pattern with high resolution and high aspect ratio. The method has low cost, large area of processed pattern area, and a broad application prospect in the aspects of the manufacturing and the application research of sub-wavelength gratings and photonic crystals.

The invention relates to a periodic nanostructure-based biosensor and a preparation method thereof. The biosensor is a surface plasmon resonance biosensor, and comprises a substrate, a noble metal thin film and a periodic nanostructure, wherein the noble metal thin film is arranged on the substrate; the periodic nanostructure is arranged on the noble metal thin film; the periodic nanostructure comprises a plurality of through-hole structures which are equally distributed and are parallel to each other; and the periodic nanostructure is used for providing wave vector matching needed by exciting surface plasma. The periodic nanostructure-based biosensor can overcome disadvantages of huge size in a conventional biosensor and provide the wave vector matching needed by exciting the surface plasma. Besides, all production processes are compatible with those of a standard semiconductor technology. The periodic nanostructure-based biosensor is simple in production processes, has relatively small size and is easy to integrate.

A replication technique is employed to reproduce substrates having periodic nanometer scale structures formed on a surface thereof. In the technique, a thin film of cellulose acetate is placed on top of a template substrate having the desired surface to be replicated. The cellulose acetate is softened, thereby taking on the configuration of the template surface. The film is peeled off, yielding a negative replica of the template surface on the underside of the film. A thin layer of suitable material, such as gold, platinum, iron or carbon, is then deposited on the underside of the film, thus resulting in formation of a replica substrate having the same periodic nanostructure characteristics as the original template.

The invention provides a class of wedge-type block copolymers having a plurality of chemically different blocks, at least a portion of which incorporates a wedge group-containing block providing useful properties. For example, use of one or more wedge group-containing blocks in some block copolymers of the invention significantly inhibits chain entanglement and, thus, the present block copolymers materials provide a class of polymer materials capable of efficient molecular self-assembly to generate a range of structures, such as periodic nanostructures and microstructures. Materials of the present invention include copolymers having one or more wedge group-containing blocks, and optionally for some applications copolymers also incorporating one or more polymer side group-containing blocks. The present invention also provides useful methods of making and using wedge-type block copolymers.

The invention relates to a silica-based semiconductor-metal nano composite material. The mateiral sequentially comprises a high-temperature protecting layer, a plasmon absorbing layer and an ordered silica nanorod array light trapping layer from outside to inside; the high-temperature protecting layer is aluminum oxide; the plasmon absorbing layer is gold nano particles. According to a periodic silica nano array structure with light trapping characteristics, light absorbing wavebands of silica can be broadened by spattering metal on the structure, the waveband is expanded from previously limited 1100 nm to full spectrum, photonic-like crystals are absorbed by optical resonant coupling of the periodic nano structure, and therefore the absorbing of the periodic nano structure is enhanced.

A method of fabricating a two dimensional nano-structure array of features comprising the steps of providing a substrate (10); forming an intermediate layer on said substrate (20), said intermediate layer having at least two selectively located regions (21, 22) of different uniform thickness; placing at least one layer of elements (30) over said intermediate layer, said elements placed in a close-packed arrangement forming an array of voids (33) between said elements; etching the intermediate layer through said voids, and so forming the array of features (51, 52) in said intermediate layer corresponding to the voids.

Periodic nanostructures for high energy-density and high-power density device and systems and uses thereof. Hierarchical nanostructured materials having stacked polymer nanowires forests interconnected by monolayer graphene sheets were fabricated through bottom-up nanofabrication. Driven by external voltage, aniline molecules and graphene oxide were alternatively assembled for hierarchical porous stacked nanostructures while graphene oxide was in-situ reduced to graphene during the assembly process. As-produced hierarchical nanostructures can be used as supercapacitor electrodes, which can utilize the discovered stack-dependent device properties.

This application discloses a new family of inorganic-organic hybrid semiconductor bulk materials built on periodic nanostructured 2D layers of ZnS that emit bright white light with high quantum efficiency. These ZnS-based crystalline inorganic-organic hybrid semiconductors have well defined and precisely controllable crystal structure and composition. Their optical emission properties, including intensity, quantum yield, and color quality, can be systematically tuned by varying the composition of both inorganic and organic components. Methods for preparing these materials, use of these materials as a new type of single-phased white light emitting phosphors, and their applications in making WLED devices are also disclosed.

A surface nanostructure forming method includes: preparing a substrate having an appropriate processing value; a first process of irradiating a part which is close to a surface of the substrate with laser light having a pulse duration of picosecond order or shorter at an irradiation intensity being close to the appropriate processing value of the substrate, or greater than or equal to the appropriate processing value and less than or equal to an ablation threshold and forming periodic nanostructures in which first modified portions and second modified portions are periodically arranged in a self-assembled manner at a focus at which the laser light is concentrated and in a region being close to the focus; and a second process of performing an etching treatment on the surface of the substrate having the periodic nanostructures formed thereon to form an uneven structure having the first modified portions as valleys.

A method and system for reading a security seal having a unique far-field pattern are described. Periodic nano-structure is generated on the surface of a substrate having spacings of hundreds of nanometers, or smaller, and affixed on a product, or generated directly onto the product. A laser beam having a wavelength longer than the periodic spacings directed onto at least a portion of the surface of the substrate at a chosen angle of incidence and a selected azimuthal angle relative to a chosen direction produces a unique far-field pattern that may be imaged by a digital image detector disposed at a chosen distance from the illuminated region, compared with a stored reference, and validated. The nanoscale sub-wavelength patterns can be printed using extreme ultraviolet light and read with readily available visible or ultraviolet light. The security seal contains a pattern that is invisible to the eye and to an optical microscope. Brand protection at different stages of the life-span of a product, from production to purchase is therefore available.