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Method for preparing high depth-diameter-ratio three-dimensional micro-channel through electronic dynamic control

A technology of electronic dynamic control and high depth-to-diameter ratio, which is applied in the field of femtosecond laser applications, can solve the problems of difficulty in processing three-dimensional microchannels with nanostructures in modified regions, and achieve the effect of improving the depth-to-diameter ratio

Inactive Publication Date: 2014-04-09
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the correlation between the nanostructure and polarization of the modified region causes difficulties in processing three-dimensional microchannels, and to provide a method for preparing three-dimensional microchannels with high depth-to-diameter ratio using electronic dynamic control

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  • Method for preparing high depth-diameter-ratio three-dimensional micro-channel through electronic dynamic control

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Embodiment 1

[0026] The femtosecond laser system 1 uses a laser produced by SpectraPhysics in the United States. The laser wavelength is 800nm, the pulse width is 50 femtoseconds, the repetition frequency is adjustable at 1KHz, the maximum energy of a single pulse is 3mJ, and the light intensity distribution is Gaussian and linearly polarized. .

[0027] Experimental sample 10 is fused silica with a thickness of 1 mm.

[0028] The present invention proposes a method for preparing a three-dimensional microchannel with a high depth-to-diameter ratio by using a femtosecond laser pulse sequence. The processing optical path is as follows: figure 1 As shown, the specific processing steps are as follows:

[0029] Step 1: Use femtosecond laser system 1 to generate femtosecond pulse laser, use the combination of half-wave plate 2 and polarizer 3 to adjust the single pulse energy to 0.5 μJ, and modulate the femtosecond laser into a pulse sequence through pulse shaper 4, the The sequence contains t...

Embodiment 2

[0035] The femtosecond laser system 1 uses a laser produced by SpectraPhysics in the United States. The laser wavelength is 800nm, the pulse width is 50 femtoseconds, the repetition frequency is adjustable at 1KHz, the maximum energy of a single pulse is 3mJ, and the light intensity distribution is Gaussian and linearly polarized. .

[0036] Experimental sample 10 is fused silica with a thickness of 1 mm.

[0037] The present invention proposes a method for preparing a three-dimensional microchannel with a high depth-to-diameter ratio by using a femtosecond laser pulse sequence. The processing optical path is as follows: figure 1 As shown, the specific processing steps are as follows:

[0038] Step 1: Use femtosecond laser system 1 to generate femtosecond pulse laser, use the combination of half-wave plate 2 and polarizer 3 to adjust the single pulse energy to 0.5 μJ, and modulate the femtosecond laser into a pulse sequence through pulse shaper 4, the The sequence contains two...

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Abstract

The invention relates to a method for preparing a high depth-diameter-ratio three-dimensional micro-channel through electronic dynamic control, and belongs to the technical field of femtosecond laser applying. The time domain shaping is carried out on a femtosecond laser, the partial instant electronic dynamic condition ( especially the freedom electron density distribution), of a modified area is regulated and controlled, the appearance of a periodicity nanometer structure of the modified area is affected, the high depth-diameter-ratio three-dimensional micro-channel irrelative to polarization can be achieved, and compared with a traditional femtosecond laser machining method, the method has the advantage that the depth-diameter-ratio can be multiply increased during the three-dimensional micro-channel machining.

Description

technical field [0001] The invention relates to a method for preparing a three-dimensional microchannel with a high depth-to-diameter ratio by using electronic dynamic control, and belongs to the technical field of femtosecond laser application. Background technique [0002] Three-dimensional microchannels with high depth-to-diameter ratio are the key structures in microfluidic devices. Because they can manipulate extremely small amounts of liquid with very high precision, they can minimize the size of chemical and biological analysis systems and further increase their integration, which has attracted many researchers. focus on. Silica-based transparent materials, mainly quartz glass, are ideal substrates for constructing many microfluidic systems due to their good optical, chemical and thermal properties. [0003] At present, the fabrication of microchannels in microfluidic systems mainly relies on photolithography, and the inherent limitation of this method is that it can...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/55C03C15/00
CPCB23K26/40B23K26/361B23K2103/50C03C15/00
Inventor 姜澜闫雪亮李晓炜
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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