Periodic nanostructure-based biosensor and preparation method thereof

A biosensor and nanostructure technology, applied in the field of biosensors, can solve the problems of bulky, difficult to integrate and carry, and achieve the effect of simple manufacturing process

CN102798615AInactive Publication Date: 2012-11-28INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
Publication Date
2012-11-28
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a periodic nanostructure-based biosensor and a preparation method thereof. The biosensor is a surface plasmon resonance biosensor, and comprises a substrate, a noble metal thin film and a periodic nanostructure, wherein the noble metal thin film is arranged on the substrate; the periodic nanostructure is arranged on the noble metal thin film; the periodic nanostructure comprises a plurality of through-hole structures which are equally distributed and are parallel to each other; and the periodic nanostructure is used for providing wave vector matching needed by exciting surface plasma. The periodic nanostructure-based biosensor can overcome disadvantages of huge size in a conventional biosensor and provide the wave vector matching needed by exciting the surface plasma. Besides, all production processes are compatible with those of a standard semiconductor technology. The periodic nanostructure-based biosensor is simple in production processes, has relatively small size and is easy to integrate.
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Description

technical field

[0001] The invention relates to a biosensor, in particular to a biosensor based on a periodic nanostructure and a preparation method thereof. Background technique

[0002] A surface plasmon is an electromagnetic wave propagating at the interface between a metal and a medium, generated by the interaction of an incident light field with electrons on the metal surface. The resonance condition of surface plasmons is very sensitive to small changes in the refractive index of the metal surface medium. Surface plasmon resonance biosensors are a major tool for characterizing biomolecular interactions. The basic principle of the surface plasmon resonance biosensor is to detect the refractive index of the analyte on the surface by recording the change of the surface plasmon resonance angle or resonance wavelength. Compared with other types of biosensors, biosensors based on surface plasmon resonance identify samples by detecting changes in the refractive index of sa...

Examples

Embodiment Construction

[0026] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0027] Such as figure 1 As shown, the biosensor based on periodic nanostructure surface plasmon resonance includes a substrate 1 , a noble metal thin film 2 and a periodic nanostructure 3 . The noble metal thin film 2 is disposed on the substrate 1 , and the periodic nanostructure 3 is disposed on the noble metal thin film 2 . The substrate 1 can be fused silica, ordinary glass, plexiglass or silicon, and can also be an organic or inorganic self-supporting film including polyimide film, silicon carbide film, silicon nitride film and the like. The composition of the noble metal thin film may be gold, silver, aluminum and other metals. When the biosensor based on periodic nanostructure surface plasmon resonance is i...