A Vertical Cavity Surface Emitting Laser for Miniature Atom Sensors

Abstract

The application discloses a vertical cavity surface-emitting laser for miniature atomic sensors, including a substrate layer, an N-type DBR layer, an active layer and a P-type DBR layer arranged on the upper surface of the N-face electrode in sequence, forming a cylindrical mesa respectively. and a segmented cylindrical mesa, an annular window is set around the cylindrical mesa, the bottom of which is located in the N-type DBR layer, and a dielectric thin film current confinement layer is provided on the bottom and side surfaces and a part of the upper surface of the P-type DBR layer around it. A P-face electrode is arranged on the upper surface of a part of the P-type DBR layer on the side, the upper surface, and the upper surface, and the upper surface of the P-type DBR layer of the segmented columnar mesa is covered with a laser mirror in the area other than the outer periphery of the P-face electrode, Without increasing the complexity of the device process and material growth process, without using external temperature control, and without affecting the performance of the device, the wavelength can be moved to the range that meets the application requirements, and the problem of device yield decline can be avoided.

Description

technical field [0001] The invention belongs to the technical field of semiconductor lasers, in particular to a vertical-cavity surface-emitting laser used for miniature atomic sensors. Background technique [0002] Vertical Cavity Surface Emitting Laser (VCSEL) is a new type of semiconductor laser whose laser emission direction is perpendicular to the chip surface. Due to its unique resonant cavity structure, VCSEL has high modulation bandwidth and is very suitable for various types of optical and electronic devices. Components are integrated in a high density. In recent years, miniature atomic sensors based on VCSEL technology, such as atomic clocks, atomic magnetometers, and atomic gyroscopes, have developed rapidly. Such atomic sensors have broad application prospects in portable positioning and navigation equipment. The main principle is to use the laser emitted by VCSEL Interact with the vapor of alkali metal atoms in tiny gas chambers to obtain the signals needed for...

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Problems solved by technology

[0005] In order to solve the above problems, the present invention provides a vertical cavity surface-emitting laser for miniature atomic sensors, which can be achieved without increasing the complexity of the device process and material growth process, without using external temperature control, and without affecting other basic performance of the device. In this way, the wavelength can be moved to the range that meets the application requirements, avoiding the problem of yield reduction caused by the influence of device material growth and manufacturing process on the wavelength

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