An ultra-precise measurement platform

Abstract

The invention discloses an ultra-precise measurement platform, including a rack assembly, locking nuts, foundation adjusting screws, supports, a potentiometer type sensor, a magnetic suspension assembly, a granite platform, an X-axis air flotation guide rail assembly, a first column, a second column, a cross beam, a Y-axis air flotation guide rail assembly, a high precision sensor, a magnetic suction device, an adjusting rod, an amesdial and a central processing unit. The foundation adjusting screws are arranged at the bottom of the rack assembly, and the locking nuts are arranged on the foundation adjusting screw and are close to the bottom of the rack assembly. An air flotation block at the bottom of the second column is in direct contact with the granite platform, brass plug ruby is adopted to throttle, an air flotation surface is provided with a voltage-sharing unload groove, thus occurrence of gas shock is effectively prevented, and high-precision motion and measurement are easy to realize.

Description

technical field [0001] The invention relates to the technical field of industrial measurement, in particular to an ultra-precision measurement platform. Background technique [0002] With the development of ultra-precision machining technology and technology, ultra-precision measurement technology is also developing continuously. Without ultra-precision measurement technology, ultra-precision machining is out of the question. In other words, ultra-precision measurement technology is the premise and foundation of ultra-precision machining technology. As an emerging technology, magnetic levitation technology has a wide range of applications in the industrial field, and is also continuously applied in the field of ultra-precision machining and manufacturing, such as ultra-precision magnetic levitation spindles, ultra-precision magnetic levitation turntables, ultra-precision magnetic levitation slides, etc.; Floating has been widely used in ultra-precision machining and has ach...

AI Technical Summary

Problems solved by technology

[0003] At present, ultra-precision measuring equipment such as three-coordinate measuring machines on the market are not as accurate as foreign equipment and are expensive. The part supporting the measuring platform on the bracket is an air-floating shock isolator, and the rigidity of the measuring platform cannot be guaranteed during the measurement process. That is to say, during the measurement process, the measurement platform is prone to float, which affects the final measurement effect; the measurement equipment such as the movement axis of the measuring machine and the three-coordinate measuring machine generally use mechanical guide rails, and rarely use air-floating guide rails. The positioning accuracy of mechanical guide rails And the straightness is far less than the positioning accuracy of the air-floating guide rail, and the measuring stroke of the measuring platform on the market is relatively small

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