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Junction profile detection sample and preparation method, junction profile detection method

A technology for testing samples and testing methods, which is applied in the semiconductor field, can solve problems such as poor reliability and difficult control, and achieve the effects of good junction profile, strong controllability, and appropriate sample preparation time

Active Publication Date: 2020-02-07
SEMICON MFG INT TIANJIN +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to provide a junction profile detection sample and its preparation method, and a junction profile detection method to solve the problems of difficult control and poor reliability in the preparation of samples in the prior art

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  • Junction profile detection sample and preparation method, junction profile detection method
  • Junction profile detection sample and preparation method, junction profile detection method
  • Junction profile detection sample and preparation method, junction profile detection method

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Embodiment Construction

[0030] The junction profile detection sample and preparation method and junction profile detection method of the present invention will be described in more detail below in conjunction with schematic diagrams, wherein a preferred embodiment of the present invention is shown, and it should be understood that those skilled in the art can modify the present invention described herein, while still achieving the advantageous effects of the present invention. Therefore, the following description should be understood as the broad knowledge of those skilled in the art, but not as a limitation of the present invention.

[0031] In the following paragraphs the invention is described more specifically by way of example with reference to the accompanying drawings. Advantages and features of the present invention will be apparent from the following description and claims. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to ...

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Abstract

The invention discloses a junction contour detection sample, a preparation method and a junction contour detection method. The preparation method of the junction contour detection sample comprises the following steps of: providing a semi-conductor sample where a P junction and / or an N junction are formed; providing hot phosphoric acid, and putting the semi-conductor sample in the hot phosphoric acid for lasting a preset time; and taking out the semi-conductor sample to clean so as to obtain the junction contour detections sample. Compared with the prior art, the junction contour detection sample is low in cost, moderate in sample making time and strong in controllability, a more excellent junction contour can be obtained, and the junction contour detection sample is good in repeatability.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a junction profile detection sample, a preparation method and a junction profile detection method. Background technique [0002] In the field of semiconductor manufacturing, failure detection of semiconductor devices is a feedback process for improving the reliability and stability of process technology, which finds and corrects the root cause of defects to overcome the problems caused by defects. Proper failure detection is critical to improving the quality of semiconductor devices, but incorrect failure detection can lengthen the period required to develop and ramp up semiconductor device products. Generally, failure detection includes external inspection, non-destructive testing, electrical performance testing, destructive testing, and the like. [0003] With the improvement of the integration of semiconductor devices and the development of miniaturization technology, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N23/225G01N1/32G01N1/34
CPCG01N1/32G01N1/34G01N23/2202G01N23/225
Inventor 韩耀梅虞勤琴郭志蓉
Owner SEMICON MFG INT TIANJIN