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Vacuum pump and segmented vane used therein

A vacuum pump and static vane technology, which is applied to the components of the pumping device for elastic fluid, the pump, the axial flow pump, etc. Effects of poor, good exhaust performance

Active Publication Date: 2021-02-19
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In this case, when the front sides of the bent portions (72a3, 72b3) abut against each other by abutting the two divided stationary vanes (70A, 70B), an unexpected reaction force is generated at the abutting portion, If one or both of the divided stationary vanes (70A, 70B) warps or other poor contact occurs, the inclination angle of the stator vane (71) set in advance at an angle suitable for exhaust will change, so as the exhaust of the vacuum pump Decreased performance, may not be able to obtain good exhaust performance

Method used

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  • Vacuum pump and segmented vane used therein
  • Vacuum pump and segmented vane used therein
  • Vacuum pump and segmented vane used therein

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Embodiment Construction

[0050] Hereinafter, preferred embodiments for carrying out the present invention will be described in detail with reference to the drawings.

[0051] figure 1 is a longitudinal sectional view of a vacuum pump to which the present invention is applied, figure 2 (a) is constituted figure 1 The top view of the static vane of the vacuum pump, figure 2 (b) is a top view of two divided stationary vanes constituting the stationary vane.

[0052] figure 1 The vacuum pump P is configured as a composite pump including a turbomolecular pump part Pt and a screw groove pump part Ps, and is used, for example, as a gas exhauster for processing chambers in semiconductor manufacturing equipment, flat panel display manufacturing equipment, and solar panel manufacturing equipment, and other chambers. The turbomolecular pump part Pt transfers gas through the rotating movable blade part A1 and the fixed stationary blade part A2, and the screw groove pump part Ps uses the screw groove B to...

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Abstract

The present invention provides a vacuum pump and it capable for effectively avoiding bad contact of a division stationary blade part and being suitable for good exhaust performance. The vacuum pump has a turbo molecular pump portion which has a stationary blade part and a rotary moving blade part. Gas is exhausted from the stationary blade part and the rotary moving blade part. The stationary blade part is configured to form at least one wheel edge and many division stationary blade parts (11A, 11B) of many blades to manually abut joint on the end portions (12a, 12a) at the peripheral direction to form an annual shape. The configuration for avoiding bad contacting of the end portion of the peripheral direction of the division stationary blade parts at the end portion of the peripheral direction of the at least one stationary blade parts is provided.

Description

technical field [0001] The present invention relates to a vacuum pump used as a processing chamber in a semiconductor manufacturing device, a flat panel display manufacturing device, and a solar panel manufacturing device, and a gas exhaust mechanism for other chambers, and a divided vane portion used therein. A structure capable of obtaining good exhaust performance by effectively preventing contact failure of the divided stationary vanes. Background technique [0002] Such a conventional vacuum pump is disclosed in Patent Document 1, for example. The vacuum pump of this document 1 includes a turbomolecular part that transfers gas by a rotating movable vane part (6) and a fixed stationary vane part (70). [0003] In addition, the aforementioned stationary vanes (70) of the vacuum pump of the document 1 are as described in the document 1 image 3 or Figure 4 As disclosed in et al., it is set in an annular shape by abutting two divided vanes ( 70A, 70B). [0004] In addit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D29/54F04D19/04
CPCF04D19/042F04D19/046F04D29/542
Inventor 大立好伸前岛靖高阿田勉
Owner EDWARDS JAPAN