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Adaptive non-zero digit interference detecting system for optical free curved surface

A technology of interference detection and non-zero position, which is applied in the direction of using optical devices, measuring devices, instruments, etc., to achieve the effect of expanding the dynamic range, realizing automatic full-aperture non-zero position detection, and avoiding the use of

Active Publication Date: 2017-07-04
ANHUI UNIVERSITY
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  • Abstract
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Problems solved by technology

[0004] The purpose of the present invention is to provide an optical free-form surface self-adaptive non-zero interference detection system to solve the problems existing in the prior art optical free-form surface detection

Method used

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  • Adaptive non-zero digit interference detecting system for optical free curved surface
  • Adaptive non-zero digit interference detecting system for optical free curved surface
  • Adaptive non-zero digit interference detecting system for optical free curved surface

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Embodiment

[0030] An example of the application of the present invention to optical free-form surface adaptive non-zero position interference detection is described as follows.

[0031] The measured free-form surface is a double-curvature surface, and the radius of curvature in the x direction is 388mm; the radius of curvature in the y direction is 386mm.

[0032] figure 1 It is a free-form surface adaptive interference detection device diagram, the laser wavelength is λ=632.8nm, the thin beam emitted by the frequency-stabilized laser L1 is expanded into a wide-beam parallel light through the collimation system L2, and the parallel light propagates forward to the beam splitter L3 is divided into two paths of light. One path propagates forward to the reference plane mirror L4, and then the original path returns as a reference wave; the other path propagates forward to the deformable mirror DML8 placed at 45° to the optical axis, and after being reflected by the deformable mirror DML8, it...

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Abstract

The invention discloses an adaptive non-zero digit interference detecting system for an optical free curved surface. The system comprises a free curved surface non-zero digit interference detecting system and an adaptive data processing and controlling system, wherein the free curved surface non-zero digit interference detecting system comprises a frequency stabilized laser, a collimating system, a beam splitter, a reference flat mirror, an imaging lens, a detector, a deformable reflector DM, a reflector and an aplanat. The adaptive data processing and controlling system comprises a system laser tracing module, a theoretical surface decomposition module, a DM deformation control module, an interferogram coupling processing module, a detected wavefront fitting module and a hysteresis error correction module. The adaptive non-zero digit interference detecting system can realize compensation for different Zernike low-order aberration by means of the continuous deformable reflector DM. Deformation of the deformable reflector is guided through the system laser tracing module, so that high-precision universal detection for a large-curvature changing free curved surface is realized.

Description

technical field [0001] The invention relates to the field of optical free-form surface detection systems, in particular to an optical free-form surface adaptive non-zero interference detection system. Background technique [0002] Due to its large surface degree of freedom, the optical free-form surface can provide or correct different on-axis or off-axis aberrations in a targeted manner, and at the same time meet the requirements of high performance, light weight and miniaturization of modern optical systems, thus gradually becoming a modern optical system. The new favorite in engineering. Although there has been steady development in design, processing, and testing, the high-precision requirements for the surface shape of optical components in the imaging field have limited the large-scale application of free-form surfaces. In particular, the detection technology of free-form surfaces has become the most important factor restricting its application. [0003] At present, ...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 张磊李劲松俞本立
Owner ANHUI UNIVERSITY
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