An integrated alignment and calibration system

Abstract

The invention discloses an alignment and calibration integrated system, and belongs to the technical field of a direct-writing exposure machine. The alignment and calibration integrated system comprises a CCD camera and an optical path assembly, wherein the optical path assembly comprises three groups of prism assemblies; each prism assembly comprises two triangular prisms arranged oppositely; and the prisms are provided with semi-transparent and semi-reflective films and total reflective films. By virtue of the alignment and calibration integrated system, the problem of inaccurate alignment and positioning in the prior art is solved; the alignment and calibration working efficiency is improved; and by integrating an alignment optical path and a calibration optical path, equipment is simplified.

Description

technical field [0001] The invention relates to an alignment and calibration integrated system, which belongs to the technical field of direct writing exposure machines. Background technique [0002] When the existing direct writing exposure machine works, two steps of alignment and calibration are required. [0003] The purpose of alignment is to find the position to be exposed on the substrate and accurately transfer the position to the DMD exposure component to ensure the accuracy of exposure. During alignment, the CCD camera captures the positioning holes or other positioning marks on the PCB, accurately records the position coordinates of the positioning holes or positioning marks, and transmits them to the DMD exposure component to complete the alignment. [0004] The purpose of calibration is to detect and determine the accuracy of the relative position between CCD camera and DMD exposure components and the relative position between different DMD exposure components....

AI Technical Summary

Problems solved by technology

However, in the prior art, two cameras, a CCD camera and a suction cup camera, are used for alignment and calibration respectively. The two cameras can move independently of each other, and their relative positional relationship is in the process of movement. The accuracy cannot be absolutely accurate, which often leads to inaccurate relative positions between the CCD camera and the suction cup camera, which in turn leads to the inaccurate determination of the relative position between the CCD camera and the DMD exposure components and the relationship between different DMD exposure components during calibration. The relative position will eventually lead to inaccurate graphic exposure, and even product scrapping

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