Method and device for measuring mechanical parameters of double-end-fixed support beam based on resonant frequency

A technology of resonant frequency and supported beam mechanics, which is applied in the measurement of mechanical parameters of double-ended fixed-supported beams. The field of measurement of mechanical parameters of double-ended fixed-supported beams based on resonant frequency can solve the problem that the equivalent residual stress of materials and single-layer thin films cannot be obtained. The mechanical parameters of materials cannot be directly applied to multi-layer films, poor stability and other problems, so as to achieve the effect of low test equipment requirements, simple test methods and stable test process

Inactive Publication Date: 2017-07-07
SOUTHEAST UNIV
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Problems solved by technology

This invention is mainly applicable to single-layer films, but the current market demand for multi-layer film material parameters is increasing, and the extraction of mechanical parameters of single-layer f

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  • Method and device for measuring mechanical parameters of double-end-fixed support beam based on resonant frequency
  • Method and device for measuring mechanical parameters of double-end-fixed support beam based on resonant frequency
  • Method and device for measuring mechanical parameters of double-end-fixed support beam based on resonant frequency

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Embodiment Construction

[0033] Aiming at the problem of on-line measurement of the mechanical parameters of the multilayer composite film structure, the idea of ​​the present invention is to obtain the resonance frequency, material properties and structural dimensions of the multilayer composite double-end fixed-support beam by constructing a resonance model of the multi-layer composite double-end fixed-support beam and other parameters, and use the form of solving equations to obtain the equivalent Young's modulus of each layer of the multi-layer composite double-end fixed beam at one time and / or the equivalent residual stress of each layer.

[0034] In order to facilitate the public's understanding of the technical solution of the present invention, the theoretical principles of the technical solution of the present invention are first described in detail.

[0035]For a multi-layer composite double-ended fixed-support beam composed of at least two layers of film structure, when the width and thickne...

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Abstract

The invention discloses a method for measuring mechanical parameters of a double-end-fixed support beam based on a resonant frequency. According to the method, equivalent young's modulus and equivalent residual stress of each layer of a multi-layer composite double-end-fixed support beam are obtained once by virtue of a solving equation set based on a relation between a first-order resonant frequency and parameters such as material properties and structure sizes of the multi-layer composite double-end-fixed support beam. The method can meet online test requirements of multi-layer film materials, a test structure and a calculation method are simple, and the accuracy is relatively high. The invention further discloses a device for measuring the mechanical parameters of the double-end-fixed support beam based on the resonant frequency.

Description

technical field [0001] The invention relates to a method for measuring the mechanical parameters of a double-end fixed beam, in particular to a method for measuring the mechanical parameters of a double-end fixed beam based on a resonance frequency, which belongs to the material parameter of a micro-electro-mechanical system (MEMS for short). Online testing technology field. Background technique [0002] The full name of MEMS is micro-electro-mechanical system, also known as micro-electro-mechanical system, micro-system, micro-machine, etc. It refers to a high-tech device with a size of a few millimeters or less. smart system. MEMS is mainly composed of three parts: sensors, actuators (actuators) and micro energy sources. MEMS involves various disciplines and engineering technologies such as physics, semiconductors, optics, electronic engineering, chemistry, materials engineering, mechanical engineering, medicine, information engineering, and bioengineering. , Synthetic b...

Claims

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Application Information

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IPC IPC(8): G01N3/00
CPCG01N3/00
Inventor 周再发孙超郭欣格黄庆安
Owner SOUTHEAST UNIV
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