Scanning sheet bearing table device and adjustment method
A kind of technology of supporting table and adjusting nail, which is applied in measuring device, material analysis using sonic wave/ultrasonic wave/infrasonic wave, instrument, etc. It can solve the problem of difficult to guarantee the selection of plate and machinability, and can be self-locking type leveling function device Difficult to realize and other problems, to achieve the effect of fast and convenient adjustment method, compact and simple structure
Pending Publication Date: 2017-07-21
INST OF ACOUSTICS CHINESE ACAD OF SCI
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Problems solved by technology
[0002]
For reflective scanning, the thickness of the substrate is not limited, so the selection of the substrate and the machinability are easy to ensure; while for the transmissive scanning, the thickness and material of the substrate are strictly limited, so the selection of the substrate and the machinability It is difficult to guarantee the stability, and it has become a bottleneck to be able to take into account both reflective scanning and transmissive scanning. In addition, it is even more difficult to realize the self-locking leveling function of the X and Y axes at the same time; for this reason, provide The invention relates to a device and adjustment method for a scanning carrier, which realizes a carrying mode of reflective, especially transmissive, scanning of the device to be tested, and is aimed at a structural method of the carrier for carrying the device to be tested
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[0030] The technical solutions of the present invention will be described in further detail below with reference to the accompanying drawings and embodiments.
[0031] figure 1 It is an axonometric schematic diagram of the structure of the scanning wafer table device of the present invention, the scanning wafer table device includes: a first support unit 1, a second support unit 2, a wafer table unit 3 and a support stand 4; wherein, the wafer table unit 3 is docked between the first support unit 1 and the second support unit 2; the first support unit 1 and the second support unit 2 are respectively tightly attached to the support stand 4; the support stand 4 is distributed in a mirror image.
[0032] figure 2 It is a schematic cross-sectional view of the first support unit of the scanning platform device of the present invention, Figure 6 It is a schematic diagram of the axonometric view of the first fixed seat of the scanning wafer stage device of the present invention, ...
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The invention relates to a scanning sheet bearing table device and an adjustment method. The scanning sheet bearing table device comprises a first bracket unit, a second bracket unit, a sheet bearing table unit and a support stand, wherein the sheet bearing table unit is in butt joint between the first bracket unit and the second bracket unit; the first bracket unit and the second bracket unit are fastened and fit with the support stand; the support stand is distributed in a mirroring manner. According to the scanning sheet bearing table device and the adjustment method, a stacked staggered double-rail standard mandrel clamping PMMA (poly methyl methacrylatemethacrylic acid) sheet bearing plate manner is adopted; functional requirements of a reflective scanning support platform or a transmitting scanning support platform, particularly functional requirements of a transmitting scanning ultrathin support platform, are taken into consideration; the device is compact and concise in structure; an adjustment mode is convenient and quick; a bearing manner in combination with reflective scanning, particularly transmitting scanning, can be performed on an element to be detected; a sheet bearing table structural form particularly for bearing the element to be detected is highlighted.
Description
technical field [0001] The invention relates to the field of ultrasonic scanning detection, in particular to a scanning film-supporting device and an adjustment method. Background technique [0002] For reflective scanning, the thickness of the substrate is not limited, so the selection of the substrate and the machinability are easy to ensure; while for the transmissive scanning, the thickness and material of the substrate are strictly limited, so the selection of the substrate and the machinability It is difficult to guarantee the stability, and it has become a bottleneck to be able to take into account both reflective scanning and transmissive scanning. In addition, it is even more difficult to realize the self-locking leveling function of the X and Y axes at the same time; for this reason, provide The invention discloses a device and an adjustment method for a scanning carrier, which realizes a carrying mode of reflective, especially transmissive scanning of a device to ...
Claims
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Login to View More IPC IPC(8): G01N29/22
CPCG01N29/225G01N2291/023Y02P70/50
Inventor 廉国选马骥冷涛宋波陈秋颖安志武韩炜胡玲闫冉张逸君毛捷
Owner INST OF ACOUSTICS CHINESE ACAD OF SCI