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IGBT

By arranging the surface body area and the separated body area at the rectangular trench connection part of the IGBT, the channel is formed only in a specific area, which solves the problem of increasing the saturation current, improves the short-circuit resistance performance, and maintains the dimensional stability of the rectangular area.

Active Publication Date: 2017-07-21
DENSO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the IGBT turn-on voltage is lower

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0023] Figure 1~4 The IGBT 10 according to the embodiment is shown. Such as Figure 2~4 As shown, the IGBT 10 has a semiconductor substrate 20, an emitter 50 and a collector 60. The emitter 50 is arranged on the upper surface 20 a of the semiconductor substrate 20. The collector 60 is arranged on the lower surface 20 b of the semiconductor substrate 20. In addition, in figure 1 Here, illustration of the structure above the upper surface 20 a of the semiconductor substrate 20 such as the emitter electrode 50 is omitted. In addition, in the following description, a direction parallel to the upper surface 20a is referred to as the x direction, a direction parallel to the upper surface 20a and orthogonal to the x direction is referred to as the y direction, and the thickness direction of the semiconductor substrate 20 (ie , The direction orthogonal to the x direction and the y direction) is called the z direction.

[0024] A plurality of grooves 91 and a plurality of grooves 92 a...

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PUM

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Abstract

An IGBT includes a rectangular trench including first to fourth trenches and a gate electrode arranged inside of the rectangular trench. An n-type emitter region includes a first emitter region being in contact with the first trench, and a second emitter region being in contact with the third trench. A body contact region includes a first body contact region being in contact with the second trench, and a second body contact region being in contact with the fourth trench. A surface body region is in contact with the trenches in ranges from connection portions to the emitter regions.

Description

Technical field [0001] The technology disclosed in this specification relates to an insulated gate bipolar transistor (IGBT). Background technique [0002] Patent Document 1 discloses an IGBT having a rectangular trench. A gate electrode is arranged in the rectangular trench. In a rectangular area (semiconductor area) surrounded by a rectangular trench, an emitter area (n-type area), a body contact area (p + Type area), low concentration body area (p - Type area) and so on. The emitter region and the emitter are in contact with the rectangular trench (ie, the gate insulating film). The body contact area is connected to the emitter. A part of the low-concentration body region is arranged on the surface layer of the semiconductor substrate, and is in contact with the emitter and the rectangular trench here. In addition, another part of the low-concentration body region is arranged on the lower side of the emitter region and the body contact region, and is connected to the recta...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L29/06H01L29/739
CPCH10D62/125H10D12/411H10D62/127H10D62/393H10D64/519H10D12/481
Owner DENSO CORP
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