IGBT
By arranging the surface body area and the separated body area at the rectangular trench connection part of the IGBT, the channel is formed only in a specific area, which solves the problem of increasing the saturation current, improves the short-circuit resistance performance, and maintains the dimensional stability of the rectangular area.
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[0023] Figure 1~4 The IGBT 10 according to the embodiment is shown. Such as Figure 2~4 As shown, the IGBT 10 has a semiconductor substrate 20, an emitter 50 and a collector 60. The emitter 50 is arranged on the upper surface 20 a of the semiconductor substrate 20. The collector 60 is arranged on the lower surface 20 b of the semiconductor substrate 20. In addition, in figure 1 Here, illustration of the structure above the upper surface 20 a of the semiconductor substrate 20 such as the emitter electrode 50 is omitted. In addition, in the following description, a direction parallel to the upper surface 20a is referred to as the x direction, a direction parallel to the upper surface 20a and orthogonal to the x direction is referred to as the y direction, and the thickness direction of the semiconductor substrate 20 (ie , The direction orthogonal to the x direction and the y direction) is called the z direction.
[0024] A plurality of grooves 91 and a plurality of grooves 92 a...
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