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Pressure sensor based on thermal resistance principle and working method thereof

A pressure sensor and working method technology, applied in the direction of measuring fluid pressure, measuring fluid pressure, instruments, etc. through electromagnetic elements, can solve the problem of inability to measure pressure quickly and accurately, and achieve a simple test method, simple structure, and ensure high-precision measurement. Effect

Inactive Publication Date: 2017-08-04
SOUTHEAST UNIV
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  • Abstract
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  • Claims
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Problems solved by technology

In this way, when the temperature field in the space around the resistor changes due to the influence of pressure, the pressure cannot be measured quickly and accurately

Method used

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  • Pressure sensor based on thermal resistance principle and working method thereof
  • Pressure sensor based on thermal resistance principle and working method thereof
  • Pressure sensor based on thermal resistance principle and working method thereof

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Embodiment Construction

[0013] The technical solutions of the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0014] Such as figure 1 As shown, a pressure sensor utilizing the principle of thermal resistance according to an embodiment of the present invention includes a substrate 1 , a thin film 2 , a first thermal resistor 3 and a second thermal resistor 4 . The upper part of the substrate 1 is provided with a cavity 101 , the thin film 2 is grown on the top surface of the substrate 1 , and the thin film 2 covers the cavity 101 . The first thermal resistor 3 and the second thermal resistor 4 are respectively located in the cavity 101 .

[0015] When the pressure sensor of the above-mentioned embodiment is in operation, when the external pressure is applied to the surface of the sensor, the film 2 bends, so that the distance from the film 2 to the bottom of the cavity 101 changes, and the air inside the cavity 101 is compressed;...

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Abstract

The present invention discloses a pressure sensor based on the thermal resistance principle and a working method thereof. The pressure sensor is simple in structure. Based on the thermal resistance principle, the pressure test is conducted, so that the test convenience is improved. The pressure sensor comprises a substrate, a thin film, a first thermal resistor and a second thermal resistor. The upper part of the substrate is provided with a cavity. The thin film is grown on the top surface of the substrate. The thin film is covered above the cavity. The first thermal resistor and the second thermal resistor are respectively positioned in the cavity.

Description

technical field [0001] The invention relates to a pressure sensor, in particular to a pressure sensor utilizing the thermal resistance principle and a working method thereof. Background technique [0002] Among the products realized by silicon micromachining technology, pressure sensors are the earliest developed category. Traditional pressure sensors include piezoresistive, capacitive, resonant, etc., which can be applied to different occasions according to their characteristics. There is no pressure sensor in the prior art that is designed based on the thermal resistance principle. In this way, when the temperature field of the space around the resistor changes due to the pressure, the pressure cannot be measured quickly and accurately. Contents of the invention [0003] Technical problem: The technical problem to be solved by the present invention is to provide a pressure sensor using the principle of thermal resistance and its working method. The pressure sensor has ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00
CPCG01L9/0051
Inventor 聂萌夏云汉杨恒山
Owner SOUTHEAST UNIV
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