Test probe, test device and test method
A technology for testing probes and testing devices, which is applied in the direction of measuring devices, measuring electricity, and measuring electrical variables, etc., and can solve the problems of low drop height of test probes and damage to substrates, etc.
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Embodiment 1
[0044] This embodiment provides a test probe 10, such as Figure 1A As shown, the test probe 10 includes a needle holder 100 and a movable needle 200 that at least partially extends into the needle holder 100 and can move relative to the needle holder 100 . The movable needle 200 is configured to be electrically connected to the needle frame 100 to output a test signal during a first stroke of moving relative to the needle frame 100 , and to be electrically disconnected from the needle frame 100 during a second stroke of moving relative to the needle frame 100 .
[0045]For example, when the test probe 10 works, the moving needle 200 of the test probe 10 will be in contact with the substrate (not shown in the figure), and the test signal will be loaded on the substrate through the conduction of the needle frame 100 and the moving needle 200 (as shown in the figure). ), for example, the movable needle 200 is in direct contact with the needle holder 100 to transmit the test signa...
Embodiment 2
[0078] This embodiment provides a test probe 10, such as Figure 4 As shown, the difference between this embodiment and Embodiment 1 is that the test signal conduction path of the test probe 10 provided in this embodiment is: probe end cover 400→needle holder 100→first conduction part 210→second conduction Part 220→Needle 230.
[0079] For example, if Figure 4 As shown, the second conducting part 220 and the needle frame 100 are insulated from each other, the first conducting part 210 is configured to maintain electrical connection with the inner wall 130 of the channel in the first stroke R1, and maintain insulation with the inner wall 130 of the channel in the second stroke R2 .
[0080] For example, if Figure 4 As shown, the needle holder 100 is provided with an insulating layer 600 on the inner wall 140 of the opening, and an insulating film 600 is provided on the inner wall of the needle holder 100 that is in contact with the first conductive portion 210 in the secon...
Embodiment 3
[0086] This embodiment provides a test device, including the test probe provided in any one of the above embodiments.
[0087] For example, if Figure 6 As shown, the test device 1 provided in this embodiment further includes a probe assembly 20 and a probe assembly support frame 30 , and the probe assembly 20 includes a plurality of test probes 10 .
[0088] For example, the test device 1 may also include a non-contact sensor, for example, the non-contact sensor may be a voltage optical imaging sensor. The voltage optical imaging sensor is used to sense the surface electric field intensity of each pixel on the substrate, and then detects the electrical defect of the pixel through a voltage comparison method.
[0089] In this embodiment, the test device adopts the test probe provided by any of the above embodiments, so the position of the test probe relative to the substrate under test can be monitored, and when the test probe exceeds the preset safety distance, the test The...
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