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vacuum pump

A technology of vacuum pump and fixed circle, applied in the direction of pump, axial flow pump, pump element, etc., can solve the problem of difficult precision, achieve the effect of not easy clearance or deviation, and restrain the decline of exhaust performance

Active Publication Date: 2020-12-11
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0024] However, in the structure where the tapered surface is formed, it may be difficult to obtain axial precision.

Method used

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  • vacuum pump
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Experimental program
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Effect test

Embodiment Construction

[0050] (i) Outline of Embodiments

[0051] In the turbomolecular pump according to the present embodiment, the fitting relationship between the fixing disc and the fixing member for the core is uniformly constrained from the outside. That is, in the fitting structure of the base and the fixed circular plate, the center alignment (positioning / positioning) is performed by means of the structure in which the outer peripheral surface of the fixed circular plate is pushed in by the inner peripheral surface of the base and joined (constrained from the outside). Heart).

[0052] In addition, in the turbomolecular pump according to the present embodiment, the engagement structure for fixing the disk is constituted by an integral part.

[0053] Furthermore, in the turbomolecular pump according to the present embodiment, the fitting position of the fixed vane and the fixed disk having the Sigban structure is separately provided.

[0054] (ii) Details of the implementation

[0055] Be...

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PUM

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Abstract

In the vacuum pump having the fixed disk, the fixed disk has a divided structure, and the gap or deviation generated on the joining surface joining the divided structure is reduced. In the turbomolecular pump according to the present embodiment, the fitting relationship between the fixed disc and the fixing member for core alignment (center alignment) is reversed from conventional ones. That is, in the fitting structure of the base and the fixed circular plate, the center alignment (positioning / centering) is performed by the structure in which the outer peripheral surface of the fixed circular plate is pushed in by the inner peripheral surface of the base and engaged (constrained from the outside). ). In addition, the mating structure for fixing the circular plate is constituted as an integral part. Furthermore, a matching position between the fixed wing and the fixed circular plate having the Sigban structure is additionally provided.

Description

technical field [0001] The present invention relates to vacuum pumps. Specifically, it relates to a vacuum pump provided with a fixed disk having a divided structure. Background technique [0002] The Sigban-type molecular pump with a Sigban-type structure in a vacuum pump is engraved with a spiral groove (also called a spiral groove or swirl groove) flow path, and the fixed disc and the rotating disc are provided with a gap (clearance) in the axial direction. [0003] In addition, the gas molecules diffused into the flow path of the spiral groove are given momentum in the tangential direction of the rotating disk (that is, in the tangential direction of the rotation direction of the rotating disk) through the rotating disk, thereby moving from the suction port to the gas molecule through the spiral groove. The exhaust port provides a dominant directionality to perform exhaust. [0004] Patent Document 1: Japanese Utility Model Registration Gazette No. 2501275. [0005] ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04
CPCF04D29/4206F04D17/168F04D19/042F04D19/046F04D29/083F04D29/403
Inventor 大立好伸前岛靖高阿田勉
Owner EDWARDS JAPAN