Design method of metal mask and preparation method of metal mask

A metal mask, design method technology, applied in computer-aided design, metal material coating process, patterned surface photoengraving process, etc. The effect of ensuring positional accuracy

Active Publication Date: 2017-10-03
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the compensation amount comes from the measurement and calculation of the alignment mark before stretching/shrinkage and the alignment mark after stretching/shrinkage in the met

Method used

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  • Design method of metal mask and preparation method of metal mask
  • Design method of metal mask and preparation method of metal mask
  • Design method of metal mask and preparation method of metal mask

Examples

Experimental program
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Embodiment 1

[0060] Aiming at the problem that the metal mask needs to be compensated in the length and width direction of the metal due to the stretching shrinkage, this embodiment provides a metal mask design method and a corresponding metal mask preparation method, using The design method of the metal mask and the corresponding metal mask preparation method do not need to prepare the sample mask in advance, and directly obtain the deformation compensation amount through calculation, so that the metal mask including the compensation amount can be designed at one time be realized.

[0061] Usually, it is known that the tensile force of the metal mask is F, the thickness is t, the width is w, the length is l, the Young's modulus is E, and Poisson's ratio is ν 0 ,but:

[0062] The cross-sectional normal stress σ of the metal mask in the stretching direction x for:

[0063] σ x =F / w×t Formula (1-1)

[0064] The cross-sectional elongation Δl of the metal mask in the stretching direction ...

Embodiment 2

[0110] This embodiment provides a method for designing a metal mask and the corresponding method for preparing a metal mask. It is not necessary to prepare a sample mask in advance, and the amount of deformation compensation can be obtained directly through calculation, so that the one-time design includes compensation A large number of metal mask plates can be realized. The difference between this embodiment and Embodiment 1 is that, in the design method of the metal mask and the corresponding method of preparing the metal mask, corrections related to the thickness of the metal mask and the inclination of the opening are also provided. parameter, and set the correction parameter C according to the thickness of the metal mask and the inclination of the opening 1 .

[0111] On the basis of the design method of the metal mask plate of embodiment 1,

[0112] Axial Young's modulus E of the metal mask x for:

[0113] E. x =E×e / (a+e) Formula (2-1)

[0114] Transverse Young's m...

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Abstract

The invention belongs to the technical field of display, and particularly relates to a design method of a metal mask and a preparation method of the metal mask. The design method of the metal mask comprises the steps that the deformation quantities, in two perpendicular directions, of the metal mask are calculated correspondingly according to the tensile strength of the metal mask in use and the deformation attributes of the metal mask in the two perpendicular directions; and deformation, in the two perpendicular directions, of the metal mask is compensated by compensation quantities identical with the deformation quantities and with the opposite deformation tendency according to the deformation quantities, in the two perpendicular directions, of the metal mask. According to the methods, the compensation quantities required when the metal mask is manufactured are obtained by calculating the tensioning shrinkage of the metal mask, and then deformation is compensated when the metal mask is manufactured; and the deformation quantities of the metal mask are taken into consideration at the initial design stage of the metal mask, the metal mask with the compensation quantities being taken into consideration is designed, and the technological cost of the metal mask is reduced.

Description

technical field [0001] The invention belongs to the field of display technology, and in particular relates to a method for designing a metal mask and a method for preparing the metal mask. Background technique [0002] With the development of technology, OLED (Organic Light Emitting Diode, referred to as Organic Light Emitting Diode) display devices are becoming more and more popular in people's lives. In the preparation process of OLED display devices, the small molecule evaporation technology of fine metal mask (Fine Metal Mask, referred to as FMM) is widely used, and the organic light-emitting material is deposited through the opening in the metal mask by using a multi-layer metal mask. Evaporated to a specific position on the backplane of the thin film transistor to achieve color display. [0003] The precision of the metal mask is on the order of microns, and the precision of matching and alignment with the thin film transistor backplane is very high. Usually, the ope...

Claims

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Application Information

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IPC IPC(8): C23C14/04H01L51/56
CPCC23C14/042H10K71/166B21D25/00G06F30/17G06F2119/14G06F2119/18Y02P90/02B21D11/02B29C55/00B29C55/065B29C55/085G01F1/36G01F1/44G03F1/36H01L22/12
Inventor 吴建鹏丁渭渭杨忠英罗昶
Owner BOE TECH GRP CO LTD
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