Method and device for simultaneous measurement of five-degree-of-freedom errors based on beam drift compensation

Abstract

The invention provides a method and a device for simultaneously measuring five degrees-of-freedom errors based on light beam drift compensation. The method and the device are used for solving the problems of low measurement precision, small measurement range and poor anti-interference capability of the existing high-precision simultaneous measurement method for guide rail five degrees-of-freedom. A collimating lens, a prism assembly, a polarization beam splitting prism and a quarter-wave plate are arranged between a laser device and a right-angle prism plated with a beam splitting film, so as to realize processing of incident light and reflected light, information of the reflected light and transmitted light after beam splitting is received and measured by means of a four-quadrant detector and a position sensitive detector, and the measurement of pitch angle, deflection angle and rolling angle errors, horizontal straightness errors, vertical straightness errors and light drift compensation are realized. The method and the device utilize double beam differential measurement to realize error separation, enhance the anti-interference capability, employ few optical devices and are low in light source power and cost; the optical structure is simple, the operation is convenient, the moving parts are not required to be provided with cables, and the field measurement is facilitated; and the angle measurement resolution is high.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to a method and device for simultaneous measurement of five-degree-of-freedom errors based on beam drift compensation, which can realize the measurement of roll angle errors that are particularly difficult to measure. Background technique [0002] Mechanical rail kinematic pairs include three linear errors: position error along the axial direction and two straightness errors perpendicular to the axial direction, and three angular errors around the axis: pitch angle, yaw angle and roll angle. If instruments and machine tools have Abbe arms in the directions corresponding to these geometric motion errors, these geometric motion errors will cause Abbe errors and affect their processing or measurement accuracy. At present, reducing or eliminating the Abbe error is mainly to reduce the Abbe arm from the structure, improve the motion accuracy and error correction of the gu...

AI Technical Summary

Problems solved by technology

[0007] Aiming at the problems of low measurement accuracy, small measurement range, and poor anti-interference ability of the existing high-precision measurement method with five degrees of freedom for guide rails, the present invention proposes a method and device for simultaneous measurement of five degrees of freedom errors based on beam drift compensation, optical structure Simple and compact, easy to operate, good accuracy, stability and economy

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