Multifunctional sensor based on double-gate thin film transistor and preparation method thereof

Abstract

The present invention discloses a multifunctional sensor based on double-gate thin film transistors. The sensor comprises the double-gate thin film transistors and one or more physical fields coupled to top gates of the double-gate thin film transistors, and the physical fields comprise a light field, a thermal field, a force field and a magnetic field. The physical fields are the thermal field and the force field. The multifunctional sensor based on double-gate thin film transistors comprises at least two independent double-gate thin film transistors integrated to a same flexible substrate, wherein the top gate surface of at least one double-gate thin film transistor is provided with a polarized piezoelectric material or non-polarized piezoelectric material, and the surface of the piezoelectric material is provided with a metal material. The multifunctional sensor based on double-gate thin film transistors can be coupled to different physical fields to from sensors with different functions.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a multi-functional sensor based on a double-gate thin film transistor and a preparation method thereof. Background technique [0002] As a fundamental building block of large-area electronics, dual-gate thin-film transistors and related products have enjoyed an exciting development and implementation timeline. Its primary application, flat-panel displays, has grown into a multi-billion dollar industry that continues to thrive. However, the potential of TFTs in non-display applications has been little explored and has not yet matured. [0003] For example, flexible electronic skin is a new type of robotic skin, which can be applied to humanoid robots and can be flexible and bendable. At the same time, it can also act on its surface to detect pressure and the temperature of the surrounding environment. [0004] At present, most electronic skins use a variety of diffe...

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Problems solved by technology

[0004] At this stage, most electronic skins use a variety of different materials to detect pressure and temperature, which makes their preparation process very complicated.

For example, when integrating a capacitive pressure sensor, there is usually a problem of crosstalk between adjacent components, which will affect the detection accuracy during the period; when integrating a CMOS pressure sensor, there will be high manufacturing costs and incompatibility with flexible substrates. Bottom question

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