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Structure light-based micro-nanostructure two-dimensional super-resolution detection method

A technology of micro-nano structure and detection method, which is applied in the field of optical detection, can solve the problems of increasing system complexity and reducing measurement efficiency, and achieve the effect of improving lateral resolution, improving measurement efficiency and simplifying the measurement system

Inactive Publication Date: 2017-11-24
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

At this time, the measurement system includes a phase shift device, which increases the complexity of the system, and needs to collect multiple pictures for this purpose, which reduces the measurement efficiency

Method used

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  • Structure light-based micro-nanostructure two-dimensional super-resolution detection method
  • Structure light-based micro-nanostructure two-dimensional super-resolution detection method

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with the accompanying drawings.

[0017] The flow chart of a two-dimensional super-resolution detection method based on structured light micro-nano structure of the present invention is as follows figure 1 As shown, the specific steps are as follows:

[0018] When there is no grating in the projection device of the FTP system, the image acquired by the CCD is expressed as a function:

[0019] g 0 (x,y)=A 0 (x,y)r(x,y) (1)

[0020] A 0 (x,y) is the distribution of the projected light field, and r(x,y) is the non-uniform reflectance of the object surface. Adding a grating to the projection device and ensuring that other conditions remain unchanged, the deformed structured light field obtained by the CCD is expressed as:

[0021] g(x,y)=A 0 (x,y)r(x,y)B 0 (1+cos(2πf 0 x)) (2)

[0022] 1+cos(2πf 0 x) is the transmittance function of the grating, f 0 is the fundamental frequency of the projected...

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Abstract

The present invention discloses a structure light-based micro-nanostructure two-dimensional super-resolution detection method. According to the method, when no optical gratings exist in a projection device, a frame of grayscale image of an image pickup device is obtained; in the context that other conditions are unchanged, an optical grating is added into the projection device, and the image pickup device obtains a frame of stripe-deformed structured light field image; Fourier transformation is performed on the two images separately, two obtained spectrum formulas are normalized, and subtraction operation is performed on the two normalized spectrum formulas, so that a fundamental frequency component can be obtained, two parts of the fundamental frequency component which are obtained after separation is performed are shifted to correct positions separately, the fundamental frequency component and a zero frequency component are superposed according to a certain weight, so that complete spectrum information can be obtained; and a two-dimensional super-resolution image detection result is obtained through restoration. With the method of the invention adopted, resolution can be improved; in a measurement process, a frame of gray image is adopted to eliminate frequency aliasing, so that the separation of the zero-frequency component from the fundamental frequency component can be realized, and therefore, measurement efficiency can be improved; and a phase-shift device is not needed when the image is collected, so that a measurement system can be simplified.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a two-dimensional super-resolution detection method based on structured light micro-nano structure. Background technique [0002] Traditional optical theory has proved that all classical optical systems are diffraction-limited systems, that is, the physical limit of the spatial resolution of an optical system is determined by the wavelength and numerical aperture of light. Although the longitudinal resolution of optical measurement methods has reached the nanometer or even sub-nanometer level, it is limited by the diffraction effect, and the lateral resolution is difficult to break through 200nm, which limits its application in high-resolution micro-nano detection. Improving the lateral resolution and realizing super-resolution detection has become an urgent problem to be solved by the optical detection method of micro-nano structure. [0003] The main idea of ​​the ex...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B9/02
CPCG01B9/02084
Inventor 陈楚怡谢仲业周毅唐燕
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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