Blue-green sensitive transmission-type GaAlAs cathode of Al compositional gradient gradual change

A component gradient, transmission technology, used in photo-emission cathodes, light-emitting cathode manufacturing, discharge tube main electrodes, etc., can solve problems such as difficult to completely remove Al oxides, inability to ensure electron transport, and low electron diffusion length. , to reduce the growth interface stress, reduce the interface recombination rate, and improve the quantum efficiency.

Active Publication Date: 2017-11-24
NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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Problems solved by technology

However, due to the low electron diffusion length in GaAlAs materials, it cannot be guaranteed that the electrons generated in the photocathode body can be completely transported to the surface.
In addition, compared with GaAs material, the Al component in GaAlAs material is easy to oxidize, the higher the Al component is, the more serious the surface oxidation is, and it is difficult to completely remove the Al oxide in an ultra-high vacuum device

Method used

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  • Blue-green sensitive transmission-type GaAlAs cathode of Al compositional gradient gradual change
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  • Blue-green sensitive transmission-type GaAlAs cathode of Al compositional gradient gradual change

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Embodiment

[0024] figure 1 It is a schematic structural diagram of a blue-green light-sensitive transmissive GaAlAs photocathode with a gradient change in Al composition in the present invention. GaAlAs photocathode bottom-up by Corning 7056 # Glass substrate 1, SiO 2 Protective layer 2, Si 3 N 4 AR layer 3, Ga 1-x1 al x1 As window layer 4, Ga with gradually changing Al composition 1-x2 al x2 As emitter layer 5 and Cs / O active layer 6 composition.

[0025] figure 2 It is a schematic structural diagram of the blue-green light-sensitive transmissive GaAlAs photocathode epitaxial material with gradient Al composition in this embodiment. Based on the "inversion structure" mode of transmission GaAs photocathode, see "G.A.Antypas and J.Edgecumbe. Glass-sealed GaAs-AlGaAs transmission photocathode, Appl.Phys.Lett.1975,26:371-372", The cathode material structure also adopts this mode to design the epitaxial material structure. In high quality (dislocation density ≤ 100cm -2 ) GaAs(10...

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Abstract

The present invention relates to a blue-green sensitive transmission-type GaAlAs cathode of Al compositional gradient gradual change which is sensitive to blue-green light. The cathode is formed by a Corning 7056# glass substrate, a SiO2 protection layer, a Si3N4 anti-reflection layer, a Ga1-x1Alx1As window layer with Al constant composition, a Ga1-x2Alx2As emission layer with Al compositional gradient gradual change and a Cs/O activation layer arranged from down to up. The blue-green sensitive transmission-type GaAlAs cathode of Al compositional gradient gradual change prepares the blue-green sensitive negative electron affinity transmission-type GaAlAs photoelectric cathode based on the Ga1-xAlxAs ternary compound Al/Ga composition control technology, the III-V group compound material epitaxy technology, the photoelectric cathode module preparation technology and the ultrahigh vacuum laser technology, combines an electron multiplier to form a blue-green detector, and can be applied to the fields of sea detection, seabed imaging and the like.

Description

technical field [0001] The invention relates to a blue-green light detection material technology, in particular to a blue-green light-sensitive transmissive GaAlAs cathode with a gradual change in Al composition. Background technique [0002] Seawater is a good window for blue-green light, and the study of new vacuum photodetector devices sensitive to blue-green light is of great significance to my country's marine application fields such as underwater detection, underwater imaging, and submarine communication. [0003] At present, the detection devices used by foreign technologically developed countries in the fields of ocean detection and other fields are low-light image intensifiers with blue-extended GaAs photocathode as the core. The highest performance blue extended GaAs photocathode currently reported in the United States is developed by ITT Company, which can reach 200mA / W at 532nm, and the quantum efficiency is greater than 40%. The detection devices used in our co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J1/34H01J9/12
CPCH01J1/34H01J9/12
Inventor 陈鑫龙唐光华徐鹏霄戴丽英杨佩佩钟伟俊
Owner NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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