Blue-green sensitive transmission-type GaAlAs cathode of Al compositional gradient gradual change
A component gradient, transmission technology, used in photo-emission cathodes, light-emitting cathode manufacturing, discharge tube main electrodes, etc., can solve problems such as difficult to completely remove Al oxides, inability to ensure electron transport, and low electron diffusion length. , to reduce the growth interface stress, reduce the interface recombination rate, and improve the quantum efficiency.
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[0024] figure 1 It is a schematic structural diagram of a blue-green light-sensitive transmissive GaAlAs photocathode with a gradient change in Al composition in the present invention. GaAlAs photocathode bottom-up by Corning 7056 # Glass substrate 1, SiO 2 Protective layer 2, Si 3 N 4 AR layer 3, Ga 1-x1 al x1 As window layer 4, Ga with gradually changing Al composition 1-x2 al x2 As emitter layer 5 and Cs / O active layer 6 composition.
[0025] figure 2 It is a schematic structural diagram of the blue-green light-sensitive transmissive GaAlAs photocathode epitaxial material with gradient Al composition in this embodiment. Based on the "inversion structure" mode of transmission GaAs photocathode, see "G.A.Antypas and J.Edgecumbe. Glass-sealed GaAs-AlGaAs transmission photocathode, Appl.Phys.Lett.1975,26:371-372", The cathode material structure also adopts this mode to design the epitaxial material structure. In high quality (dislocation density ≤ 100cm -2 ) GaAs(10...
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