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Blue-green light-sensitive transmissive Gaalas cathode with gradient al composition

A composition gradient, blue-green light technology, applied in the direction of photo-emission cathode, light-emitting cathode manufacturing, discharge tube main electrode, etc. To achieve the effect of reducing the growth interface stress, reducing the interface recombination rate, and improving the quantum efficiency

Active Publication Date: 2019-08-09
NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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Problems solved by technology

However, due to the low electron diffusion length in GaAlAs materials, it cannot be guaranteed that the electrons generated in the photocathode body can be completely transported to the surface.
In addition, compared with GaAs material, the Al component in GaAlAs material is easy to oxidize, the higher the Al component is, the more serious the surface oxidation is, and it is difficult to completely remove the Al oxide in an ultra-high vacuum device

Method used

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  • Blue-green light-sensitive transmissive Gaalas cathode with gradient al composition
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  • Blue-green light-sensitive transmissive Gaalas cathode with gradient al composition

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Embodiment

[0024] figure 1 It is a schematic structural diagram of a blue-green light-sensitive transmissive GaAlAs photocathode with a gradient change in Al composition in the present invention. GaAlAs photocathode bottom-up by Corning 7056 # Glass substrate 1, SiO 2 Protective layer 2, Si 3 N 4 AR layer 3, Ga 1-x1 Al x1 As window layer 4, Ga with gradually changing Al composition 1-x2 Al x2 As emitter layer 5 and Cs / O active layer 6 composition.

[0025] figure 2 It is a schematic structural diagram of the blue-green light-sensitive transmissive GaAlAs photocathode epitaxial material with gradient Al composition in this embodiment. Based on the "inversion structure" mode of transmission GaAs photocathode, see "G.A.Antypas and J.Edgecumbe. Glass-sealed GaAs-AlGaAs transmission photocathode, Appl.Phys.Lett.1975,26:371-372", The cathode material structure also adopts this mode to design the epitaxial material structure. In high quality (dislocation density ≤ 100cm -2 ) GaAs(10...

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Abstract

The invention relates to a transmissive GaAlAs cathode with gradient gradient of Al composition, which is sensitive to blue-green light; the cathode is manufactured from bottom to top by Corning 7056 # Glass substrate, SiO 2 Protective layer, Si 3 N 4 AR layer, Ga with constant Al composition 1‑x1 Al x1 As window layer, Ga with Al composition gradient 1‑x2 Al x2 As emission layer and Cs / O activation layer. The present invention is based on Ga 1‑x Al x As ternary compound Al / Ga composition control technology, III-V compound material epitaxy technology, photocathode component preparation technology and ultra-high vacuum activation technology, blue-green light-sensitive negative electron affinity transmissive GaAlAs photocathode is prepared , combined with an electron multiplier to form a blue-green light detector, which can be used in ocean detection, seabed imaging and other fields.

Description

technical field [0001] The invention relates to a blue-green light detection material technology, in particular to a blue-green light-sensitive transmissive GaAlAs cathode with a gradual change in Al composition. Background technique [0002] Seawater is a good window for blue-green light, and the study of new vacuum photodetector devices sensitive to blue-green light is of great significance to my country's marine application fields such as underwater detection, underwater imaging, and submarine communication. [0003] At present, the detection devices used by foreign technologically developed countries in the fields of ocean detection and other fields are low-light image intensifiers with blue-extended GaAs photocathode as the core. The highest performance blue extended GaAs photocathode currently reported in the United States is developed by ITT Company, which can reach 200mA / W at 532nm, and the quantum efficiency is greater than 40%. The detection devices used in our co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J1/34H01J9/12
CPCH01J1/34H01J9/12
Inventor 陈鑫龙唐光华徐鹏霄戴丽英杨佩佩钟伟俊
Owner NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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