Sample position calibration method and calibration device

Abstract

The invention provides a sample position calibration method and a calibration device. The method comprises steps: a sample bearing device bearing a sample is loaded to a view field of an optical microscope; a positioning marker is arranged on the sample bearing device; the optical microscope is adopted to image the sample bearing device in a first amplification, the positioning marker in the image is recognized, and first coordinates of the positioning marker under the optical microscope are acquired; the sample bearing device is loaded to a view field of a scanning electron microscope, the scanning electron microscope is adopted to image the sample bearing device in a second amplification, the positioning marker in the image is recognized, and second coordinates of the positioning marker under the scanning electron microscope are acquired, according to the first coordinates and the second coordinates, the relative position relationship between a coordinate system corresponding to the optical microscope and a coordinate system corresponding to the scanning electron microscope is determined; and based on the relative position relationship, the sample is positioned. The problem of inaccurate positioning in the case of conversion of the sample between the optical system and the scanning electron microscope can be solved.

Description

technical field [0001] The invention relates to the technical field of scanning electron microscopes, in particular to a sample position calibration method and device. Background technique [0002] Traditional scanning electron microscopy is widely used in sample microscopic morphology detection and comprehensive analysis. However, due to its high magnification and small field of view, it is difficult to locate the position of the sample to be measured. At present, a scanning electron microscope combined with an optical microscope system and its detection method have been proposed. The method includes: using an optical microscope to optically detect the sample to obtain an overall navigation map of the surface of the sample to be tested; based on the navigation map , located at the specified position of the sample to be tested, and a scanning electron microscope is used for higher-resolution detection. The above-mentioned entire detection process is automatically completed...

AI Technical Summary

Problems solved by technology

[0003] Based on the scanning electron microscope and its detection method, when the sample is first transmitted from the optical field of view to the scanning electron microscope field of view for detection, it is difficult to accurately locate the same position. Therefore, a reliable sample position calibration method is needed

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