Small square silicon core high-precision cutting process

Abstract

The invention relates to a small-square-silicon-core high-accuracy cutting technology. The small-square-silicon-core high-accuracy cutting technology includes the following steps that 1, a cylindricalsilicon bar is taken; 2, four guiding resin strips are pasted on the end face of a single crystal silicon section of the silicon bar through glue, and the guiding resin strips are connected from headto tail to form a square; 3, a crystal cup is pasted on the end face of a polycrystalline silicon section of the silicon bar through glue; 4, the silicon bar is hung to a multi-wire cutting machine through the crystal cup; 5, the angle position of the silicon is adjusted, and the guiding resin strips on the end face of the single crystal silicon of the silicon bar are mutually perpendicular to adiamond net for cutting the guiding resin strips; 6, a square line net of the multi-wire cutting machine continues to move upwards, and therefore cutting of the whole silicon bar is completed. By means of the small-square-silicon-core high-accuracy cutting technology, the cutting perpendicularity of the silicon bar can be adjusted and positioned, deviation between the diamond line and the siliconbar is generated during cutting is prevented accordingly, and the final production quality and the yield are effectively guaranteed.

Description

technical field [0001] The invention relates to a high-precision cutting process for small square silicon cores, belonging to the technical field of polysilicon production. Background technique [0002] At present, most of the current domestic polysilicon production processes are the conventional trichlorosilane hydrogen reduction method, that is, the improved Siemens method, the improved Siemens method or other similar methods. The main equipment for producing large-diameter polysilicon is the polysilicon reduction furnace. The long silicon core is powered on to heat the silicon core until the surface temperature reaches 1100 degrees Celsius, and high-purity trichlorosilane and hydrogen are introduced to make hydrogen reduction reaction occur at high temperature to make trichlorosilane The silicon molecules in the silicon pile up on the silicon core, making its diameter continuously increase. Usually, the diameter of the silicon core is 7-10 mm, which can be round or square...

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Problems solved by technology

[0005] At present, the masterbatch of silicon core cutting is directly made of silicon rods produced in the reduction furnace. When cutting silicon cores, the silicon rods need to be hung on the cutting machine. It is very inconvenient to adjust the verticality of the silicon rods during cutting. Rods deviate, which affects the final product quality and yield

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