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Cathode arc target device and vacuum multi-arc ion plating machine

A multi-arc ion and vacuum coating technology, which is applied in ion implantation coating, vacuum evaporation coating, sputtering coating, etc., can solve the problems of production stability, product quality reliability, slow vacuuming efficiency, and short maintenance cycle. problems, to achieve the effect of solving vacuum leakage and frequent maintenance, easy guarantee of vacuum degree, and high vacuuming efficiency

Pending Publication Date: 2018-01-09
东莞市典雅五金制品有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the cathode arc target device, the sliding vacuum seal of the driving arc starting part basically adopts the traditional oil seal or O-shaped rubber ring seal. High precision requirements
Even so, the sliding vacuum sealing part of the arc striking part often produces vacuum leakage due to various reasons, which seriously affects the stability of production and the reliability of product quality.
In addition, in the current vacuum multi-arc ion coating machine, there are still problems such as slow vacuuming efficiency and difficulty in guaranteeing the vacuum degree.

Method used

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  • Cathode arc target device and vacuum multi-arc ion plating machine
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  • Cathode arc target device and vacuum multi-arc ion plating machine

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Embodiment Construction

[0020] The structural principle and working principle of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0021] Such as figure 1 As shown, a cathode arc target device includes an arc target body 1, a target material 2, an arc ignition system 3, a sliding rod 4, a sliding sealing mechanism 5, and a sliding cylinder 6; the target material 2 is installed on the arc target body 1- side, the sliding rod 4 is slidably installed on one end of the arc target body 1, the sliding cylinder 6 is connected with the sliding rod 4, and drives the arc striking system 3 to approach or move away from the target 2 through the sliding rod 4; The sealing mechanism 5 is arranged outside the sliding rod 4, and is used for vacuum sealing the sliding rod 4; the sliding sealing mechanism 5 includes a bellows 51 and a bellows frame 52, and the bellows frame 52 is installed on the arc target body 1, the two ends of the bellows 51 are welde...

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Abstract

The invention discloses a cathode arc target device and a vacuum multi-arc ion plating machine. The cathode arc target device comprises an arc target body, a target material, an arc striking system, asliding rod, a sliding sealing mechanism and a sliding cylinder, wherein the target material is installed on one side of the arc target body, the sliding rod is installed at one end of the arc targetbody in a sliding manner, the sliding cylinder is connected with the sliding rod, and the arc striking system is driven to be close to or far away from the target material through the sliding rod; and the sliding sealing mechanism is arranged outside the sliding rod and used for conducting vacuum sealing on the sliding rod, the sliding sealing mechanism comprises a bellows and a bellows frame body which is installed on the arc target body, and the two ends of the bellows are welded to the bellows frame body. The cathode arc target device is good in sealing performance, not prone to being subjected to vacuum leakage, easy to maintain, long in service life, simple in structure, reliable and practical.

Description

technical field [0001] The invention relates to the technical field of vacuum coating equipment, in particular to a cathode arc target device and a vacuum multi-arc ion coating machine. Background technique [0002] As a vacuum coating production equipment, the vacuum multi-arc ion coating machine has been widely used in industrial production. As the core component of the coating machine, the cathode arc target is directly related to the stability and reliability of the entire production system. Stability of product quality. In the cathode arc target device, the sliding vacuum seal of the driving arc starting part basically adopts the traditional oil seal or O-shaped rubber ring seal. The precision requirement is higher. Even so, the sliding vacuum sealing part of the arc starting part often also produces vacuum leakage due to various reasons, which seriously affects the stability of production and the reliability of product quality. In addition, in the current vacuum mul...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/56
Inventor 王军红车少锋郑卫民王珍
Owner 东莞市典雅五金制品有限公司
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