White light self-interference surface detector

Abstract

The invention discloses a white light self-interference surface detector, which comprises a stage, a microscope light path and an imaging light path. The microscope light path and the imaging light path are arranged on the stage. The microscope light path consists sequentially from up to down of a Kohler illuminating system light source, an aperture diaphragm, a beam splitting prism and an objective lens. The aperture diaphragm is provided with randomly distributed array pinholes therein. The imaging light path consists sequentially from outside to inside of a CCD, a Fourier transform lens, apure phase liquid crystal light valve and a telescopic lens. The optical axis of the microscope light path is perpendicular to the stage, the optical axis of the imaging light path is perpendicular tothe optical axis of the microscope light path, and an intersection point between the optical axis of the microscope light path and the optical axis of the imaging light path is on a beam splitting plane of the beam splitting prism. The white light self-interference surface detector in the invention has the advantages of simple structure, higher anti-interference and anti-seismic performance, simple post-processing with only four times of imaging, better imaging effect and higher resolution.

Description

technical field [0001] The invention relates to the technical field of detection instruments, in particular to a white light self-interference surface detection instrument. Background technique [0002] Surface precision detection is of great significance in the modern manufacturing industry. Surface precision detection technology is widely used in plastic chemical industry, paper and fiber industry, electronics industry, metal industry and other fields, such as in high-precision bearings, steel balls, transparent films, semi- In the manufacturing process of transparent materials, etc., surface precision inspection is very important. [0003] In the prior art, the most representative instrument for measuring surface profile by white light interferometry is ZYGO's 3D optical surface profiler. It is determined by the nature, which requires a high-precision piezoelectric platform to do multiple imaging or scanning in the vertical direction. To obtain the white light interfere...

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Problems solved by technology

[0005] 2. The light intensity of the two beams of interference light cannot be adjusted adaptively according to different situations, which affects the contrast and measurement accuracy of the interference;

[0006] 3. The complexity of the device is high, and a high-precision stepping electronically controlled lifting device is installed in the vertical direction as the vertical scanning system, and even a closed-loop feedback system is required to obtain sub-nanometer vertical resolution;

[0007] 4. More than hundreds of imaging scans need to be repeated;

[0008] 5. Multiple CCD images need to be processed in the follow-up, and the algorithm is more complicated;

[0009] 6. The interferometer needs to design a special objective lens to obtain direct light and scattered light for interference imaging

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