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55 results about "Köhler illumination" patented technology

Köhler illumination is a method of specimen illumination used for transmitted and reflected light (trans- and epi-illuminated) optical microscopy. Köhler illumination acts to generate an even illumination of the sample and ensures that an image of the illumination source (for example a halogen lamp filament) is not visible in the resulting image. Köhler illumination is the predominant technique for sample illumination in modern scientific light microscopy. It requires additional optical elements which are more expensive and may not be present in more basic light microscopes.

Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method

To optionally forming a multilevel light intensity distribution on an illumination pupil plane, the illumination apparatus implements Köhler illumination on an illumination target surface, using as a light source the light intensity distribution formed on the illumination pupil plane on the basis of light from a light source. The illumination apparatus has a spatial light modulator, a condensing optical system, and a control unit. The spatial light modulator has a plurality of reflecting surfaces which are two-dimensionally arranged and postures of which can be controlled independently of each other. The condensing optical system condenses light from the reflecting surfaces to form a predetermined light intensity distribution on the illumination pupil plane. The control unit controls the number of reflecting surfaces contributing to arriving light, for each of points on the illumination pupil plane forming the light intensity distribution, according to a light intensity distribution to be formed on the illumination pupil plane.
Owner:NIKON CORP

Optical coherence tomography method and device based on radial-direction polarized beams

The invention provides an optical coherence tomography method and device based on radial-direction polarized beams. The method comprises the following steps that after light beams emitted by a low-coherence light source are processed through a Kohler illumination system, the polarization state of the light beams is adjusted and controlled through a polarization transformation system, the amplitude and phase distribution of the light beams are adjusted and controlled through a pupil filter, and accordingly the radial-direction light beams are formed; the radial-direction polarized beams enter a beam splitter prism in an incident mode, are divided into two paths, and enter a sample arm and a reference arm respectively; the two-path light beams are focused on a sample to be measured and a reference plane mirror through microscope objectives of the two-path light beams respectively; returned light after being reflected by the sample to be measured and the reference plane mirror joins in the position of the beam splitter prism, is focused through a focusing lens, is imaged in a probe and is then transmitted to a computer to be post-processed; the reference plane mirror transversely moves to achieve transverse scanning; the sample to be measured is placed on a three-dimensional horizontal-moving table capable of moving in space to achieve three-dimensional imaging of the sample.
Owner:BEIJING INFORMATION SCI & TECH UNIV

Full-field optical coherence tomographic three-dimensional medical imaging device and method

The invention discloses a full-field optical coherence tomographic three-dimensional medical imaging device and a full-field optical coherence tomographic three-dimensional medical imaging method. The device comprises a Kohler illumination part, a reference arm, a sample arm, an imaging lens and an area array CCD detector; according to the method, piezoelectric ceramics are adopted for phase shift of a reference mirror according to the white light low-coherence interference theory; the optical path of the two arms is changed; CCD is used for receiving an interference signal; the interference signal is processed by a computer to obtain a two-dimensional fault map of a sample; finally an electric control displacement platform is used for axial scanning to obtain three-dimensional information, wherein a single chip can be used for emitting two different signal modulation piezoelectric ceramics; the CCD and the electric control displacement platform for the two arms correspond to two demodulation modes. According to the device and the method disclosed by the invention, the sample needs not to be subjected to the treatments such as slicing, dyeing and fluorescence labeling; frozen sections and paraffin sections which have the defects such as complex preparation and low resolution ratio can be replaced; a handhold medical instrument can be made for submicron-grade in-vitro imaging or in-vivo imaging of biological tissues.
Owner:NANJING UNIV OF SCI & TECH

EPI-illumination system for an array microscope

An epi-illumination system for an array microscope. For Kohler illumination, illumination light sources are placed, actually or virtually, at the pupils of respective individual microscope elements of an array microscope. In one Kohler illumination embodiment, the light source is a point source comprising the tip of an optical fiber placed on the optical axis at the pupil of its corresponding microscope element. In another Kohler illumination embodiment, the illumination light is provided by a reflective boundary placed on the optical axis of a corresponding microscope element. For critical illumination the light sources are placed at locations conjugate with their respective object planes so as to image the light sources thereon. For dark-field illumination, the support material around a microscope element lens, which is used to support an array of lenses, is fashioned to form an illumination optical element so that light from an off-axis source is directed by the illumination element toward the object plane at an angle such that light will not be reflected into the field of view of the imaging system, but scattered or fluorescence light will be within that field of view. The illumination optical element may be refractive element, a Fresnel element, a reflective element, a diffractive element, or some combination of one or more of these elements. An array of pinhole apertures may be provided to operate the array microscope in a confocal mode. All of the embodiments may be used for epi-fluorescence microscopy.
Owner:DMETRIX INC

Coaxial double-telecentric imaging optics system

The invention discloses a coaxial double-telecentric imaging optics system, which comprises a coaxial illumination system, an imaging system and a light blocking element, wherein a front objective lens group and a beam splitting element are shared by the coaxial illumination system and the imaging system; a light source, an illumination objective lens group, the beam splitting element and the front objective lens group form the coaxial illumination system; the coaxial illumination system and the light blocking element form a Kohler illumination system to provide illumination with good evenness for an object plane; and the front objective lens group, the beam splitting element, a rear objective lens group and the light blocking element form a double-telecentric imaging system with small distortion and high multiplying power. According to the coaxial double-telecentric imaging optics system, high illumination evenness can be obtained, an imaged image has a good contrast ratio, and the measurement precision of the whole system is finally improved. Meanwhile, the coaxial double-telecentric imaging optics system has a simple structure, and system cost and realization difficulty are reduced.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Detector of properties of gate line of solar cell piece

The invention discloses a detector of properties of a gate line of a solar cell piece. The detector is characterized by comprising a mirror column, a baseplate, an image acquisition optical system, a control mechanism and a micro-displacement distance measurement device, wherein an object lens in the image acquisition optical system is arranged above a table top of a working table in the control mechanism, the working table in the control mechanism is of a three-axis linkage working table which can move in x direction, y direction and z direction, a digital display dial indicator in the micro-displacement distance measurement mechanism is connected with a z-direction table plate in the three-axis linkage working table, a measuring end of the digital display dial indicator is in vertical leaning connection with the baseplate of the detector, and the image acquisition optical system comprises a high-power plano-field semi-apochromatic objective epi-Kohler illumination light path structure. The device is high in detection precision, in line with the detection requirements of a silver electrode of the gate line, reliable in data, small in occupied area, simple in structure and convenient to operate; the instrument has fast detection speed, the average each-point detection time is 4 seconds, and the detection requirements can be achieved; and the detector is convenient to use and low in cost.
Owner:GUILIN UNIV OF ELECTRONIC TECH

Single axis illumination for multi-axis imaging system

InactiveUS7312432B2Improved telecentricityModify spatialBeam/ray focussing/reflecting arrangementsSolid-state devicesPhase maskCritical illumination
A single-axis illumination system for a multiple-axis imaging system, particularly an array microscope. A single-axis illumination system is used to trans-illuminate an object viewed with an array of imaging elements having multiple respective axes. The numerical apertures of the imaging elements are preferably matched to the numerical aperture of the illumination system. For Kohler illumination, the light source is placed effectively at the front focal plane of the illumination system. For critical illumination, the light source is effectively imaged onto the object plane of the imaging system. For dark field illumination, an annular light source is effectively provided. For phase contrast microscopy, an annular phase mask is placed effectively at the back focal plane of the objective lens of the imaging system and a corresponding annular amplitude mask is provided effectively at the light source. For Hoffman modulation contrast microscopy, an amplitude mask is placed effectively at the back focal plane of the objective lens of the imaging system and a slit is provided at a source of light of the illumination system. Structured illumination and interferometry, and a secondary source, may also be used with trans-illumination methods and apparatus according to the present invention.
Owner:DMETRIX INC

White-light scanning interferometry measurement method and system

The invention relates to a white-light scanning interferometry measurement method and system. The system comprises a white-light scanning module, a calibration module, a fixed flat plate and a piezoelectric ceramic micro displacement platform, wherein the white-light scanning module comprises a white light source, a Kohler illumination system, a first beam splitter, a second beam splitter, a first microobjective, a second microobjective, an imaging lens, first, second, third, fourth and fifth plane mirrors and a first single-color black-and-white image sensor; the calibration module comprises a laser and a second single-color black-and-white image sensor. According to the system and the method, the central wavelength of a light source is not required to be calibrated, the calculation accuracy is not affected by enveloping shapes of interference signals, the anti-noise performance is good, and the method and the system can be widely applied to signal processing of white-light scanning interferometry measurement.
Owner:SOUTH CHINA NORMAL UNIVERSITY

Synchronous polarization phase shift focus measurement system based on Linnik type interference microscope

The invention discloses a synchronous polarization phase shift focus measurement system based on a Linnik type interference microscope. The system comprises a white light source, a collimating mirror,a first quarter wave plate, a laser light source, a Kohler illumination system, a polarizing prism, a transflective mirror, a cubic beam splitting prism, two microscope objectives, a reference plane,a second quarter wave plate, an analyzer, a focusing lens, a beam splitting prism, an x-direction line array CCD and a y-direction line array CCD. The white light source generates white light, and plane polarized light is formed by means of collimation, polarization and the like. After being split by the cubic beam splitting prism, the light irradiates the reference plane and a tested sample through two microscope objectives. The return light is split by the beam splitting prism, and then irradiates the x-direction line array CCD and the y-direction line array CCD to generate an interference fringe image. Focus measurement is realized according to the defocus aberration change of the image. Laser is uniformly emitted by the Kohler illumination system, and is reflected by the polarizingprism and the like. The sample is directly written through the cubic beam splitting prism and the like. The system provided by the invention has the advantages of fast data processing and real-time focusing, and can acquire the position and shape information of the tested sample.
Owner:NANJING UNIV OF SCI & TECH

Non-contact type on-line detector for piston pin external diameter

The invention discloses a non-contact device for online measurement of the outer diameter of a piston pin. A light source, a first lens, apertures, a second lens, a V-shaped groove, an objective lens and a planar CCD are sequentially disposed on a guide track and positioned on the same optical axis, a measured piston pin is disposed inside the V-shaped groove, and the planar CCD is connected with a computer via a data acquisition card. The measured piston pin is provided with uniform parallel lights by a Kohler illumination system to allow the upside contour of the measured piston pin to be imaged on the planar CCD sensor, and the outer diameter of the piston pin can be determined by image processing and calibrating the imaging part of the piston pin, so as to overcome the limitation of the CCD area to the size of the measured piston pin. Meanwhile, the invention uses sub-pixel image processing method, so as to overcome the influence of the CCD resolution to measurement accuracy. The invention has the advantages of rapid operation, remarkably improved measurement efficiency, and remarkably improved measurement accuracy arising from the sub-pixel image processing method.
Owner:CHINA JILIANG UNIV

Projection device and method for projection comprising optical free-form surfaces

What is shown is a projection device having at least one light source and an array of optical channels. Each channel includes a first refractive optical free-form surface and a second refractive optical free-form surface and projection optics. The first and second refractive optical free-form surfaces are arranged between the light source and the projection optics and cause Köhler illumination of the projection optics by an object light pattern, resulting in the image to be projected on an image surface of the projection optics, wherein images of the array of optical channels superimpose one another.
Owner:FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV

Illumination optical system and exposure apparatus having the same

An illumination optical system for Koehler-illuminating a target surface with light from a light source includes a light integrator for forming a secondary light source, the light integrator including plural elements formed directly onto a substrate; a condenser for condensing the light from the light integrator; and a shield for shielding the light that goes straight in interfaces among the plural elements from an effective illumination area on the illuminated surface.
Owner:CANON KK

White light self-interference surface detector

InactiveCN107702661AImprove the halo effectCapable of surface inspectionMicroscopesUsing optical meansSelf interferenceLiquid crystal light valve
The invention discloses a white light self-interference surface detector, which comprises a stage, a microscope light path and an imaging light path. The microscope light path and the imaging light path are arranged on the stage. The microscope light path consists sequentially from up to down of a Kohler illuminating system light source, an aperture diaphragm, a beam splitting prism and an objective lens. The aperture diaphragm is provided with randomly distributed array pinholes therein. The imaging light path consists sequentially from outside to inside of a CCD, a Fourier transform lens, apure phase liquid crystal light valve and a telescopic lens. The optical axis of the microscope light path is perpendicular to the stage, the optical axis of the imaging light path is perpendicular tothe optical axis of the microscope light path, and an intersection point between the optical axis of the microscope light path and the optical axis of the imaging light path is on a beam splitting plane of the beam splitting prism. The white light self-interference surface detector in the invention has the advantages of simple structure, higher anti-interference and anti-seismic performance, simple post-processing with only four times of imaging, better imaging effect and higher resolution.
Owner:FUJIAN NORMAL UNIV

Tandem type full-field optical tomography imaging device and method based on compensation interferometer

The invention discloses a tandem type full-field optical tomography imaging device and a tandem type full-field optical tomography imaging method based on a compensation interferometer. The device comprises a broadband halogen light source, a kohler illuminating system, the compensation interferometer, a second beam splitter prism, a detection interferometer, a sample, an imaging lens and an area array CCD. The method comprises the following steps: light emitted by the broadband halogen light source enters the compensation interferometer through the kohler illuminating system; the light reflected by each of two arms of the compensation interferometer is divided into two light beams by the second beam splitter prism; one beam enters the detection interferometer; part of the light entering the detection interferometer is reflected, and the other part of the light penetrates through the detection interferometer to illuminate the sample; the light reflected by the detection interferometer is used as reference light; the reference light meets backwards scattered light of the sample to generate interference; after passing through the second beam splitter prism, an interference signal is focused onto the area array CCD through the imaging lens. The tandem type full-field optical tomography imaging device has the characteristics of convenience for operation, high resolution, high imaging speed, compact structure and convenience for hand holding and internal observation.
Owner:NANJING UNIV OF SCI & TECH

Method for determining matching relations among components in photoetching lighting system

The invention provides a method for determining matching relations among components in a photoetching lighting system. The method can determine the matching relations of the components in the photoetching lighting system correctly and fast. The detailed process includes: determining magnification K of a relay lens; determining compound eye array parameters comprising a compound eye array micro lens aperture p LA, micro lens focal length f LA in the compound eye array and a compound eye array outer diameter D array; obtaining focal length f CS of a collecting lens and entrance pupil diameter D pupil of the collecting lens according to a kohler lighting basic principle; judging whether D pupil is larger than D array, on yes judgment, selecting a compound eye array again, otherwise, conducting light tracking according to a current determined parameter D pupil, adjusting a compound eye array standard and the D pupil till lighting evenness meets design objective requirements; and enabling the D pupil to be an outgoing beam of a beam shaping unit, determining the matching relations among a beam expanding lens, diffractive optical elements, a zoom lens and a cone lens according to an incident beam and the outgoing beam of the beam shaping unit so as to finish matching of the components in the photoetching lighting system.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY

Tube lens with long front tube length within optical system for digital pathology

A tube lens includes a singlet and a doublet with a long front tube length between a lens stop and the tube lens. The front tube length is 1.0 to 1.5 times an effective focal length of the tube lens. The front tube length provides sufficient space for an optical platform, a folding mirror, and a telescope. The telescope rotates between a 2× mode with front and back doublets and a 1× mode with a clear aperture. The field angle of the tube lens is 4.0 degrees. Specific glass types correct the lateral color in a system for digital pathology with a white LED and a color CCD sensor. The system for digital pathology further includes an objective lens with a numerical aperture at 0.50-0.55, and a Kohler illumination system with a numerical aperture of critical illumination at 0.75-0.85 times the numerical aperture of the objective lens.
Owner:L A OMEGA

Microscopic imaging system for sample analysis

The invention relates to a microscopic imaging system. The microscopic imaging system comprises a light source, a first lens group, a first diaphragm, a second diaphragm, a second lens group, an imaging pool, a microscope objective, a third lens group and a camera which are sequentially arranged along an optical axis, wherein the light source, the first lens group, the first diaphragm, the second diaphragm and the second lens group form a Kohler illumination unit; the microscope objective, the third lens group and the camera form an imaging unit; the Kohler illumination unit has a first numerical aperture, and the microscope objective has a second numerical aperture; and the ratio of the first numerical aperture and the second numerical aperture is not greater than 1 / 3. The microscopic imaging system appropriately reduces the illumination numerical aperture and improves the contrast of an image under the condition that the resolution of the image is acceptable, thereby being conducive to shooting high-speed moving cells, and being conducive to subsequent picture analysis and processing.
Owner:SHENZHEN XIAOFU MEDICAL TECH CO LTD

Single axis illumination for multi-axis imaging system

InactiveUS20080073486A1Modify spatial and angular property of lightImproved telecentricityBeam/ray focussing/reflecting arrangementsMaterial analysis by optical meansPhase maskCritical illumination
A single-axis illumination system for a multiple-axis imaging system, particularly an array microscope. A single-axis illumination system is used to trans-illuminate an object viewed with an array of imaging elements having multiple respective axes. The numerical apertures of the imaging elements are preferably matched to the numerical aperture of the illumination system. For Kohler illumination, the light source is placed effectively at the front focal plane of the illumination system. For critical illumination, the light source is effectively imaged onto the object plane of the imaging system. For dark field illumination, an annular light source is effectively provided. For phase contrast microscopy, an annular phase mask is placed effectively at the back focal plane of the objective lens of the imaging system and a corresponding annular amplitude mask is provided effectively at the light source. For Hoffman modulation contrast microscopy, an amplitude mask is placed effectively at the back focal plane of the objective lens of the imaging system and a slit is provided at a source of light of the illumination system. Structured illumination and interferometry, and a secondary source, may also be used with trans-illumination methods and apparatus according to the present invention.
Owner:DMETRIX INC

Single-pixel microscopic imaging system and method based on Kohler illumination

The invention relates to a single-pixel microscopic imaging system and method based on Kohler illumination. The system comprises a laser light source, a spectrometer, a beam expander, a collimating lens, a first diaphragm, a polarizer, a digital micro mirror, an analyzer, a Kohler mirror, a second diaphragm, a third diaphragm, a collecting mirror, a precision objective table, a converging lens anda photoelectric detector that are arranged successively from left to right along the same optical axis. Besides, the microscopic imaging system also includes a computer connected with the digital micro mirror, the precision objective table, and the photoelectric detector electrically. The computer is used for controlling the digital micro mirror, the precision objective table, and the photoelectric detector. According to the invention, with the provided system, the robustness, sensitivity and resolution of the imaging system can be improved.
Owner:EAST CHINA JIAOTONG UNIVERSITY

Double-telecentric Kohler illumination light path

The invention discloses a double-telecentric Kohler illumination light path, which comprises a light source and lenses, wherein the light path consists of two light groups including a light gathering mirror light group and a light collecting mirror light group divided by six lenses which are in coaxial arrangement with the center of the light source, the light path is sequentially provided with the light source, the first crescent lens, the second crescent lens, the third concave lens, the fourth convex lens, the fifth convex lens and the sixth concave lens from left to right, a light diaphragm is arranged between the fourth convex lens and the fifth convex lens, and after the light source passes through the lens system, light beams are projected to the infinity part. The double-telecentric Kohler illumination light path has the advantages that the lens number is small, the imaging quality is high, the length of the total light path can be conveniently regulated, the application range is greatly improved, the cost performance is higher, and the structure is simple.
Owner:GUILIN UNIV OF ELECTRONIC TECH

Computed ghost imaging system and computed ghost imaging method based on Kohler illumination

The invention discloses a computed ghost imaging system and a computed ghost imaging method based on Kohler illumination. The system comprises a He-Ne laser device, a beam expander, a collimating lens, a diaphragm, a polarizer, a spatial light modulator, an analyzer, a Kohler mirror, an aperture diaphragm, a field diaphragm, a collecting lens, a to-be-imaged object, a convergent lens and a bucket detection orderly arranged on a light path, wherein the spatial light modulator and the bucket detector are respectively in electrical connection with a computer, the computer is used for acquiring a high-contrast image of the to-be-imaged object through the computed ghost imaging technology, and a Kohler illumination mode and a Lorentz shaping incoherent light source are introduced into a computed ghost imaging process. In the system and the method provided by the invention, in combination with the Kohler illumination mode and the Lorentz shaping incoherent light source, a defect of unevenness of intensity of illumination of an object plane can be eliminated and resolving power of the computed ghost imaging system can be improved, and high-contrast and high-resolution computed ghost imaging of the to-be-imaged object can be realized.
Owner:EAST CHINA JIAOTONG UNIVERSITY

LCD projector light source system employing three sheet LED lamp plates

The invention relates to an LCD projector light source system employing three sheet LED lamp plates. The system comprises a heat radiation apparatus, a light source circuit board, a red LED light source, a green LED light source, a blue LED light source, a TIR lens, a fly-eye lens, a Kohler illumination lens group, a red LCD panel and polaroid group , a green LCD panel and polaroid group , a blue LCD panel and polaroid group, a synthesized prism and a projection objective. The TIR lens enables a light emitted by an LED to be collected to greatest extent and to be collimated; the collimated light beam is subdivided and focused by the fly-eye lens and then is projected on the LCD panels by the Kohler illumination lens group, so that uniformity of reception of the luminous energy on the LCD panels can be ensured; and the light that penetrates the LCD panels is synthesized by the synthesized prism and then is projected on a screen by the projection objective to carry out imaging. According to the invention, an LED light source is employed; the utilization of the TIR lens enables complexity of an optical path to be further reduced; therefore, an integral structure of a projector is simplified and a volume of the projector is reduced; moreover, a utilization rate of the luminous energy is enhanced to the greatest extent and a practical effect is substantial.
Owner:TIANJIN IAT SCI & TECH

Full-field structured light coherence coding tomography device and method

The invention discloses a full-field structured light coherence coding tomography device and method. The device comprises a structured Kohler illumination system, a beam splitter prism, a first microscope objective, a second microscope objective, a reference mirror, piezoelectric ceramics, a sample, a three-axis displacement platform, an imaging lens and an area-array camera. The method comprisesthe following steps: dividing convergent light emitted by the structured light Kohler illumination system into two identical beams of light by the beam splitter prism, wherein the two beams of light respectively enter the rear focal planes of the pair of identical first and second micro-objective lenses, and uniform structure illumination with adjustable field of view and light intensity is formedon the surfaces of the reference lens and the sample; arranging the sample on the three-axis displacement platform, sample light returned from the sample and reference light returned from the reference mirror interfere at the beam splitter prism, and focusing interference light on the area-array camera through the imaging lens. The method has the advantages that the parallel imaging resolution ishigh, the illumination mode is easy to program, the algorithm is easy to transplant, the measurement time is short, and the sample category is not limited.
Owner:NANJING UNIV OF SCI & TECH

High-resolution microscopic imaging method based on multi-angle illumination deconvolution

The invention discloses a high-resolution microscopic imaging method based on multi-angle illumination deconvolution. Different from a Kohler illumination mode adopted by a traditional bright field microscope, the system adopts an LED array as an illumination light source, and object information of different spatial frequency components is obtained by sequentially collecting object images at different illumination angles; then, intensity transfer functions corresponding to different illumination angles are calculated according to system parameters, and least square deconvolution reconstruction is carried out on the image. Compared with a traditional imaging method for simultaneously acquiring all spatial frequency information through a bright field microscope, the method has higher robustness to noise by using a least square deconvolution algorithm.
Owner:南京理工大学智能计算成像研究院有限公司

Low-cost DLP projection light path structure and equipment capable of loading standard interface industrial lens

The invention relates to a low-cost DLP projection optical path structure capable of loading a standard interface industrial lens, and the structure comprises an illumination optical path which comprises a light source assembly, an illumination lens, a DMD chip, and a prism group. The illumination optical path further comprises a diffusion sheet which eliminates the influence of the image of the light source assembly and homogenizes the brightness of the light beam. The diffusion sheet is combined with the illumination lens; meanwhile, the light beam convergence degree is controlled; the dodging effect similar to that of a compound eye and an integrating column is achieved; and therefore, the problems of high cost caused by compound eye mold opening, too long integral column and too many lenses are avoided; moreover, the illumination mode of the invention is different from critical illumination, so that the LED is clearly imaged on the DMD; different from Kohler illumination that emergent light is collimated, the light beams are irradiated on the DMD in a slight convergence state, so that clear projection of surface lines of the LED is avoided, the outline of a light spot is rectangular, and compared with a circular outline of Kohler illumination, the use efficiency of illumination is greatly improved.
Owner:深微光电科技(深圳)有限公司

Surface charge measuring system of dielectric barrier discharge of plate electrode

The invention discloses a surface charge measuring system of dielectric barrier discharge of a plate electrode. The system comprises a discharge unit, a dielectric surface detection portion and a detection data processing portion, the plate electrode is arranged in a discharge air chamber in the discharge unit, the external part is connected with a vacuum pump, a high-voltage electrode of the plate electrode is formed by a copper ring high-voltage electrode and an ITO coated glass plate, a grounding electrode is formed by a BSO crystal and a grounding aluminum electrode, a measured sample is arranged in the middle of the plate electrode, the dielectric surface detection system is formed by a laser, a Kohler illumination system, a polarized light splitter, a linear light filter, a lambda / 8wave plate, a linear polarized light filter, an optical filter, a linear light filter, a color-light filter and a high-speed camera, and light passing the dielectric surface detection system is finally input to the detection data processing portion for data processing. The system can accurately analyze the accumulation, distribution and change conditions of dielectric surface charges in a quantitative manner, and the application prospect is wide.
Owner:SOUTH CHINA UNIV OF TECH +1

High-precision three-dimensional imaging device based on coaxial translation speckle projector

The invention relates to the field of optical three-dimensional imaging, and particularly discloses a high-precision three-dimensional imaging device based on a coaxial translation speckle projector. The high-precision three-dimensional imaging device comprises a control module, a driving circuit, a motor, chromium-plated glass engraved with speckle patterns, an LED illumination light source and a Kohler illumination system consisting of a compound lens array. Compared with a traditional digital speckle projection technology, the automatic control system saves the time for replacing speckle patterns, ensures the translation distance parameter with the maximum irrelevance of the patterns according to experiments, and is more favorable for realizing the real-time performance of three-dimensional reconstruction compared with the previous scheme on the premise of ensuring higher precision, and a novel high-speed and high-precision three-dimensional reconstruction system is realized.
Owner:WISESOFT CO LTD +1

A white light scanning interferometry method and system

The invention relates to a white-light scanning interferometry measurement method and system. The system comprises a white-light scanning module, a calibration module, a fixed flat plate and a piezoelectric ceramic micro displacement platform, wherein the white-light scanning module comprises a white light source, a Kohler illumination system, a first beam splitter, a second beam splitter, a first microobjective, a second microobjective, an imaging lens, first, second, third, fourth and fifth plane mirrors and a first single-color black-and-white image sensor; the calibration module comprises a laser and a second single-color black-and-white image sensor. According to the system and the method, the central wavelength of a light source is not required to be calibrated, the calculation accuracy is not affected by enveloping shapes of interference signals, the anti-noise performance is good, and the method and the system can be widely applied to signal processing of white-light scanning interferometry measurement.
Owner:SOUTH CHINA NORMAL UNIVERSITY
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