The invention discloses a synchronous polarization phase shift focus measurement
system based on a Linnik type interference
microscope. The
system comprises a
white light source, a collimating mirror,a first quarter wave plate, a
laser light source, a Kohler illumination
system, a polarizing
prism, a transflective mirror, a cubic
beam splitting prism, two
microscope objectives, a
reference plane,a second quarter wave plate, an analyzer, a focusing lens, a
beam splitting prism, an x-direction
line array CCD and a y-direction
line array CCD. The
white light source generates
white light, and plane polarized light is formed by means of collimation, polarization and the like. After being split by the cubic
beam splitting prism, the light irradiates the
reference plane and a tested sample through two
microscope objectives. The return light is split by the beam splitting prism, and then irradiates the x-direction
line array CCD and the y-direction line array CCD to generate an interference fringe image. Focus measurement is realized according to the defocus aberration change of the image.
Laser is uniformly emitted by the Kohler illumination system, and is reflected by the polarizingprism and the like. The sample is directly written through the cubic beam splitting prism and the like. The system provided by the invention has the advantages of fast
data processing and real-time focusing, and can acquire the position and shape information of the tested sample.