Surface charge measuring system of dielectric barrier discharge of plate electrode

Abstract

The invention discloses a surface charge measuring system of dielectric barrier discharge of a plate electrode. The system comprises a discharge unit, a dielectric surface detection portion and a detection data processing portion, the plate electrode is arranged in a discharge air chamber in the discharge unit, the external part is connected with a vacuum pump, a high-voltage electrode of the plate electrode is formed by a copper ring high-voltage electrode and an ITO coated glass plate, a grounding electrode is formed by a BSO crystal and a grounding aluminum electrode, a measured sample is arranged in the middle of the plate electrode, the dielectric surface detection system is formed by a laser, a Kohler illumination system, a polarized light splitter, a linear light filter, a lambda / 8wave plate, a linear polarized light filter, an optical filter, a linear light filter, a color-light filter and a high-speed camera, and light passing the dielectric surface detection system is finally input to the detection data processing portion for data processing. The system can accurately analyze the accumulation, distribution and change conditions of dielectric surface charges in a quantitative manner, and the application prospect is wide.

Description

technical field [0001] The invention relates to the field of dielectric barrier discharge characteristic testing, in particular to a surface charge measurement system for dielectric barrier discharge of flat plate electrodes. Background technique [0002] Dielectric Barrier Discharge (DBD) is a gas discharge in which an insulating medium is inserted into the discharge space, also known as silent discharge. Compared with corona discharge and arc discharge, the temperature and density of low-temperature plasma generated by dielectric barrier discharge are moderate. At the same time, dielectric barrier discharge is easy to achieve large-area uniform discharge, so it is very beneficial to large-scale industrial applications, especially for large-scale material surface treatment. In addition, dielectric barrier discharge is also widely used in ozone generation, film growth, plasma etching, sterilization, biomedicine, plasma display and other fields. It can be seen that the diel...

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Problems solved by technology

[0004] People have made more hypothetical analyzes on the influence of the surface charge of the medium on the gas discharge through simulation methods, but the accuracy of the experimental data is lacking, and the distribution of the charge on the surface of the medium cannot be monitored and analyzed in real time.

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