Tandem type full-field optical tomography imaging device and method based on compensation interferometer
An optical tomography and imaging device technology, which is applied in the direction of material analysis, measurement device, instrument, etc. by optical means, can solve the problems of the influence of lateral resolution, limited axial resolution, small numerical aperture, etc., and achieves compact structure, Easy to hold and easy to operate
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[0039] In this embodiment, a tandem full-field optical tomography device based on a compensation interferometer is used for imaging, and the specific adjustment steps include:
[0040] Step 1: The light emitted by the broadband halogen light source 1 enters the compensation interferometer through the Kohler illumination system, and the linear displacement stage 10 in the compensation interferometer is adjusted so that the signals of the two arms in the compensation interferometer interfere to obtain the first set of interference fringes, that is, the reference position ;
[0041] Step 2, the light passing through the compensating interferometer is divided into two beams by the first dichroic prism 6, one of which enters the detection interferometer, and the sample 14 is placed on the focal plane of the microscopic objective lens 12 in the detection interferometer to realize the separation of the sample 14 Uniform lighting;
[0042] Step 3, starting from the reference position...
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