New power device control automatic electrostatic protection test system and method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 常州鼎先电子有限公司
- Publication Date
- 2019-09-06
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
Technical field
[0001] The invention relates to the field of electrostatic reliability testing in semiconductor reliability testing, in particular to a novel automatic system and method for measuring the electrostatic protection characteristics of semiconductor components. Background technique
[0002] Electrostatic protection has always been a key research direction in semiconductor reliability. With the continuous advancement of semiconductor manufacturing processes, the risk of damage to integrated circuits caused by electrostatic discharge has received increasing attention. In the research of electrostatic reliability and electrostatic protection design, how to measure the electrostatic characteristics of the device under test is particularly important.
[0003] In order to meet the needs of electrostatic reliability research, electrostatic protection design and evaluation of electrostatic protection level, all electrostatic protection phenomena are mainly divided into human bo...