The invention belongs to the technical field of
semiconductor testing, and discloses a novel automatic detection
system and method for the electrostatic protection performance of a power device. A distributed parasitic parameter
network model is constructed by acquiring packaging structure parameters of a to-be-tested power device and physical
layout data of a
test fixture, key parasitic
parameter distribution is identified in combination with a
time domain reflection measurement technology, a
waveform distortion coefficient is calculated, and a spatio-temporal evolution model of electrostatic
pulse propagation is constructed. Based on the model, a compensatory
predistortion waveform is generated to counteract the parasitic effect of a transmission path, a device port response
signal is collected in real time, an energy dissipation characteristic spectrum is extracted through
wavelet packet
decomposition, and quantitative evaluation of the electrostatic protection performance is achieved. According to the invention, the test precision and
repeatability are improved, and the method is suitable for electrostatic protection tests of various novel power devices, especially high-frequency wide-
band gap devices.