The present application relates to a kind of Hartmann
wavefront measurement
dynamic range extension method based on
quadratic phase control, belong to
wavefront measurement technical field.For the problem that the measurable slope interval is limited in the limited detection displacement range in traditional Hartmann
wavefront measurement, at least the sub-aperture phase distribution containing reference focusing phase and
quadratic phase term is constructed in super
surface phase control, and the displacement of each sub-aperture corresponding
light spot on the detection surface and the
local average slope of the sub-aperture satisfy the preset monotone reversible nonlinear mapping relationship in design working interval by combining theoretical modeling, numerical optimization and / or experimental calibration.The present application can reconstruct the slope-displacement encoding rule of traditional Hartmann under the premise of keeping
local average slope reversible and wavefront reconstructable, extend the encodable slope range in given displacement range, so as to improve the
dynamic range of Hartmann wavefront measurement, especially suitable for the measurement scene of strong non-uniform,
large dynamic range wavefront.