Novel control automation type electrostatic protection test system and electrostatic protection test method for power devices

Abstract

The invention discloses a novel control automation type electrostatic protection test system and an electrostatic protection test method for power devices. According to the switch control device of the system, a plurality of semiconductor power devices are respectively arranged between a power supply and a charging transmission line, and the controls signals of the power devices are connected intoa microprocessor. Another plurality of semiconductor power devices are respectively arranged between the charging transmission line and a pulse propagation transmission line, and the controls signalsof the power devices are also connected into the microprocessor. According to the invention, the semiconductor power devices are adopted as the switch device of the system. In combination with a plurality of power device switch devices, a proper charging transmission line and a combination thereof are selected. Therefore, a pulse testing system with various pulse widths can be realized. Accordingto the system, the semiconductor power devices are used as the switch device to realize the multi-path control, so that the advantages of low cost, easy manufacture and debug, convenient maintenance,good stability, flexible usage and the like are realized. In combination with an automatic test system composed of a micro-controller, the system can be applied to the automatic testing of electrostatic protection and the like, and can completely meet the requirements of the multi-pulse width test.

Description

technical field

[0001] The invention relates to the field of electrostatic reliability testing in semiconductor reliability testing, in particular to a novel automatic system and method for measuring the electrostatic protection characteristics of semiconductor components. Background technique

[0002] Electrostatic protection has always been a key research direction in semiconductor reliability. With the continuous advancement of semiconductor manufacturing processes, the risk of damage to integrated circuits caused by electrostatic discharge has received increasing attention. In the study of electrostatic reliability and electrostatic protection design, how to measure the electrostatic characteristics of the device under test is particularly important.

[0003] In order to meet the needs of electrostatic reliability research, electrostatic protection design and evaluation of electrostatic protection levels, all electrostatic protection phenomena are mainly divided into hum...

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