Electric leakage detection system and polycrystalline silicon reduction furnace

Abstract

The invention relates to the field of polycrystalline silicon production equipment, and discloses an electric leakage detection system and a polycrystalline silicon reduction furnace. The electric leakage detection system comprises a grounding wire and a current differential detection module, wherein the current differential detection module can detect an amplitude change rate of leakage current in the grounding wire, so that whether the type of a grounding short-circuit fault in the reduction furnace belongs to a circuit short caused by dust accumulation or silicon junction at an electrode orfalling of silicon rods according to a detection result of the current differential detection module, thereby deciding whether to shut down the furnace to process or continue to operate according toactual conditions, and reducing the great economic loss caused by shutdown of the furnace due to misjudgment. The polycrystalline silicon reduction furnace disclosed by the invention is provided withthe electric leakage detection system, and the furnace wall of a furnace body of the polycrystalline silicon reduction furnace is grounded through the grounding wire, thereby being convenient for technicians to judge the short-circuit type in the reduction furnace.

Description

technical field [0001] The invention relates to the field of polysilicon production equipment, in particular to a leakage detection system and a polysilicon reduction furnace. Background technique [0002] Today, with the increasingly severe energy crisis, people are paying more and more attention to the photovoltaic industry, which has greatly promoted the development of the photovoltaic industry to a certain extent, and polysilicon has played an important role in the development of the photovoltaic industry. Polysilicon is the photovoltaic industry and the semiconductor industry. At present, most of the polysilicon production in my country adopts the improved Siemens method, which is the most mature process for producing polysilicon. In this method, the reaction of trichlorosilane and hydrogen in the reduction furnace to form silicon is the key step of the whole process. , but also the most important link of energy consumption. In order to enable the enterprise to meet prod...

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Problems solved by technology

[0003] Generally, the grounding is mainly caused by the contact between the inverted silicon rod and the inner wall of the bell jar of the reduction furnace, or as the reaction in the reduction furnace proceeds, the silicon and dust on the insulating sheet at the electrode of the reduction furnace chassis cause a grounding short circuit. The method is to detect the current in the grounding loop. When the leakage current reaches the set threshold, the electrical system will display that the reduction furnace has a single-phase grounding. Therefore, it is impossible to accurately determine which method caused the grounding short circuit. Take measures to stop the furnace for reprocessing, but in actual production, the grounding wire is equipped with a protective resistor, and dust or silicon knots deposited on the electrodes cause ground leakage, which has limited impact on the electrical system and the reduction furnace, so it is not necessary to shut down the furnace immediately; In case of faulty silicon rods, the high-temperature silicon rods are likely to burn the furnace wall, so the furnace should be shut down immediately to take protective measures

The shutdown measures taken without knowing the cause of the failure have a great impact on production and economic losses

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