Laser induced plasma spectrum analysis system capable of simulating environmental change of metallurgical vacuum furnace
A plasma spectroscopy, laser-induced technology, applied in the field of steel sample composition detection
Inactive Publication Date: 2018-03-09
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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But such an atmosphere environment is not the atmosphere environment of the vacuum furnace in the actual production of metallurgical enterprises.
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[0038] According to the first aspect of the present invention, the present invention relates to a laser-induced plasma spectroscopic analysis device, which includes a laser, a laser introduction system, a sample chamber to be tested, a spectrum derivation and collection system, a spectroscopic system and a spectrum receiving system, wherein the laser And the spectrum receiving system is controlled by the same pulse generator sending instructions. The laser emitted by the laser is focused to the sample through the introduction system, so that the surface of the sample forms plasma, generates a laser-induced spectrum, and exports the generated fluorescence to the spectrum collection system through the export system. Through the calculation, processing and analysis of the collected spectrum, the sample contains Qualitative and quantitative inspection of elements, in which the sample chamber to be tested is a set of vacuum experimental chambers that simulate vacuum smelting furnace...
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Laser induced plasma spectrum analysis equipment comprises a laser, a laser import system, a to-be-detected sample chamber, a spectrum export and collecting system, a light splitting system and a spectrum receiving system, wherein the same pulse generator transmits instruments to control the laser and the spectrum receiving system. The laser transmitted by the laser is focused at the sample position through the import system, plasma is formed on the surface of the sample, a laser induced spectrum is generated, the generated fluorescence is exported to the spectrum collecting system through theexport system, and elements in the sample are checked qualitatively and quantitatively by calculating, treating and analyzing the collected spectrum, wherein the to-be-detected sample chamber is a set of vacuum experiment cavity for simulating a vacuum smelting furnace and comprises a vacuum system, a vacuum degree monitoring system and an inductance smelting system, has the function of monitoring and acquiring temperature and vacuum degree synchronously, can realize 1800-DEG C heating and has high vacuum maintaining characteristic; and the vacuum system can realize vacuum degree continuous change range from 0.1 to 10 Pascal.
Description
technical field [0001] The application field of the present invention is steel sample composition detection, especially real-time online detection of steel sample composition under different vacuum degrees close to the metallurgical production environment by laser-induced plasma spectroscopic analysis equipment with a laser-induced light source pulse width of 10 nanoseconds. Background technique [0002] At present, there are laser-induced plasma spectroscopic analysis equipment with a laser-induced light source pulse width of a fixed nanosecond value for laser-induced plasma spectroscopic analysis of steel sample components in an air environment and a laser-induced plasma spectroscopic analysis device with a fixed nanosecond pulse width of a laser-induced light source. Plasma spectroscopic analysis equipment is used in ultra-high vacuum (generally the degree of vacuum is 10 -1 to 10 -4 Laser-induced plasma spectroscopic analysis of steel sample composition in a Pascal) env...
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IPC IPC(8): G01N21/71
CPCG01N21/718G01J3/0208G01J3/44G01J3/4406G01N21/6402
Inventor 孙辉樊仲维
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI