Light path alignment method for convex aspheric surface reflector detection

A technology of aspheric surface and mirror, which is applied in the field of optical inspection, and can solve problems such as the inability to meet the high-precision inspection of convex aspheric mirrors

Active Publication Date: 2018-03-16
CHANGGUANG SATELLITE TECH CO LTD
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Problems solved by technology

[0005] Based on this, it is necessary to align the optical paths of the interferometer, Handel sphere and the mirror to be inspected only by visual inspection in the prior art, resulting in a certain inclination and eccentricity between the three, which ca

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  • Light path alignment method for convex aspheric surface reflector detection
  • Light path alignment method for convex aspheric surface reflector detection
  • Light path alignment method for convex aspheric surface reflector detection

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[0024] The technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0025] Such as figure 1 Shown is the principle diagram of the aberration-free point detection method using the Handel sphere. The standard spherical wave emitted by the interferometer through the standard mirror is reflected to the Handel sphere through the mirror to be inspected. Based on the characteristics of the aberration-free point, the Handel sphere reflects the incident The light is reflected by the mirror to be inspected, and finally reflected back to the interferometer through the standard mirror, so as to realize the detection of the surface shape and the effective area size and shape of the mirror to be inspected. For a system that uses Handel spheres to detect convex aspheric mirrors, precise control of the relative positional relationship between the interferometer standard mirror, Handel sphere and the mi...

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Abstract

The invention relates to a light path alignment method for convex aspheric surface reflector detection and belongs to the technical field of optical detection. The method is characterized by realizingcoarse alignment between an interferometer and a Handel ball by utilizing a scale mark device fixed at the back face of the Handel ball; realizing perfect alignment between the interferometer and theHandel ball by utilizing a cat eye image of an interferometer spherical standard mirror; and after finishing light path alignment between the interferometer and the Handel ball, carrying data processing on a surface interference image of a convex aspheric surface reflector to be detected collected by the interferometer, and determining whether light path alignment between the Handel ball and theconvex aspheric surface reflector to be detected is realized by judging whether an outer circle data center and an inner hole data center of the surface interference image obtained after data processing are overlapped, thereby solving the problem of alignment between the convex aspheric surface reflector to be detected and the whole optical detection system in the process of adopting the Handel ball to carry out convex aspheric surface reflector detection.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to an optical path alignment method for detection of convex aspheric mirrors. Background technique [0002] For the mirror of the coaxial structure aerospace camera, the convex aspheric mirror is usually used as the secondary mirror of the camera. The surface shape accuracy, the size and shape of the effective area of ​​the convex aspheric mirror are directly related to the final imaging quality of the aerospace camera. and area, so the high-precision detection of the surface shape and effective area of ​​the convex aspheric mirror is of great significance to the entire aerial camera. [0003] For the detection of the surface shape and effective area of ​​a convex aspheric mirror, the following two methods are usually used: the first is to use the optical compensation method, using a transmission compensator or a computer generated hologram (Computer Generated Hologram, CG...

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Application Information

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IPC IPC(8): G01B9/02
Inventor 王兴武志勇王高文李冰琳
Owner CHANGGUANG SATELLITE TECH CO LTD
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