A micro-droplet generation chip based on PDMS positive pressure drive and its manufacturing method
A micro-droplet and chip technology, applied in the field of microfluidics, can solve the problem of unstable gas release rate, etc., and achieve the effects of low cost, convenient use and simple operation
Active Publication Date: 2019-09-27
BEIJING UNIV OF TECH
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Problems solved by technology
[0005] The purpose of the present invention is to overcome the disadvantages of the active method to generate micro-droplets using too much additional equipment and the unstable release rate of the microfluidic chip driven by the characteristics of PDMS dissolved gas.
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[0052] The present invention is based on the PDMS positive pressure-driven micro-droplet generation chip manufacturing method, implementation scheme
[0053] The microfluidic upper chip 1 in the present invention adopts SU-8 type negative photoresist to make a positive mold, and polydimethylsiloxane (PDMS) injection molding process is used for manufacturing. The specific process flow is as follows:
[0054] (a) with Figure 6 , using a silicon substrate 38 as the substrate, cleaning it with deionized water, and drying it on a rubber drying table at a temperature of 110° C.;
[0055] (b) with Figure 7 , spin-coat a layer of SU-8 glue 39 on the silicon substrate 38, the thickness of the glue layer is 50 μm-250 μm, use a hot plate for pre-baking, first dry at a temperature of 65 ° C for 35 minutes, and then bake at a temperature of 95 ° C Drying time 30-90min (related to the thickness of the adhesive layer, the greater the thickness, the longer the drying time), then cool natu...
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The invention discloses a micro-fluidic chip for micro droplet generation and a manufacturing method thereof and belongs to the technical field of micro-fluidics. The invention provides a micro droplet generation chip based on PDMS (Polydimethylsiloxane) positive pressure drive by combining a micro droplet generation chip and a PDMS positive pressure drive gas source. The operating principle is asfollows: the PDMS positive pressure gas source is connected with a gas inlet of the micro-fluidic chip by virtue of a three-way sealed hose, so that positive pressure gas discharge is performed to drive flow of two-phase liquid in micro-channels, and micro droplets are formed at an intersection of two-phase flow channels. Moreover, the area of a gas permeable membrane is controlled by utilizing length change of flow velocity regulation liquid in a flow velocity regulation channel, so that the aim of regulating the rate of gases released by the PDMS gas source entering the two-phase flow channels, and regulation of the flow rate of the two-phase liquid is indirectly reached. The micro droplet generation chip disclosed by the invention is adjustable in micro droplet size, convenient to use,simple in operation and low in cost and can be repeatedly used.
Description
technical field [0001] The invention relates to a microfluidic chip for microfluidic generation and a manufacturing method thereof, in particular to a microfluidic chip for generating positive pressure driven by utilizing the gas-dissolving characteristics of PDMS, and belongs to the field of microfluidic technology. Background technique [0002] Micro-droplets have very important research and application value in many industrial production processes. For example, in chemical engineering, engineers use droplet-based technology to implement steps in chemical process control such as rectification and flotation. Micro-droplets can also replace traditional containers as micro-reactors, and carry out various chemical reactions in micro-droplets, including redox reactions. In the food industry and personal care products, micro-droplets are used to improve the taste and taste of products, as well as functionality, for example, the smaller the dispersed droplets in creams or lotion...
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IPC IPC(8): B01L3/00
Inventor 刘本东李默涵田宝华杨旭杨佳慧
Owner BEIJING UNIV OF TECH