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Evaporation touch plate and evaporation device

A technology of evaporation and carrier plate, which is applied in the directions of vacuum evaporation plating, sputtering plating, ion implantation plating, etc., and can solve problems such as abnormal white spots

Pending Publication Date: 2018-04-13
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The embodiment of the present invention provides an evaporation carrier and an evaporation device, which solves the problem of abnormal white spots when the substrate to be evaporated is lit.

Method used

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  • Evaporation touch plate and evaporation device
  • Evaporation touch plate and evaporation device
  • Evaporation touch plate and evaporation device

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Embodiment Construction

[0036] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0037] When using an evaporation device for vacuum evaporation, when the evaporation device is used for evaporation, an evaporation carrier, a substrate to be evaporated, a mask (Mask) and an evaporation source are arranged in sequence. Since the evaporation carrier and the substrate to be evaporated are often adsorbed together in a vacuum environment and are not easy to separate, in order to solve this problem, the relevant evaporation carrier 01 is often used...

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Abstract

The embodiment of the invention provides an evaporation touch plate and an evaporation device, and belongs to the technical field of evaporation. The evaporation touch plate and the evaporation devicesolve the problem that white point abnormal phenomenon occurs when a to-be-evaporated base plate is lightened. The evaporation touch plate is used for bearing the to-be-evaporated substrate, and theto-be-evaporated substrate comprises a plurality of sub-evaporation substrates. The evaporation touch plate comprises a base plate and a plurality of embosses, wherein the embosses are separately arranged on the base plate; each emboss corresponds to one sub-evaporation substrate; the orthographic projection of each emboss on the to-be-evaporated substrate overlaps a display region of the sub-evaporation base plate corresponding to the emboss, and the overlapping area is larger than 1 / 3 of the area of the corresponding display region and is smaller than the area of the corresponding sub-evaporation substrate; and the surface, used for making contact with the to-be-evaporated substrate, of each emboss is a plane or a cambered surface which protrudes towards the side away from the base plate. The evaporation touch plate and the evaporation device are used in the evaporation working procedures.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to an evaporation carrier and an evaporation device. Background technique [0002] The vacuum evaporation method is to heat the evaporation material through the evaporation source in the vacuum evaporation chamber, so that the atoms or molecules of the evaporation material vaporize and escape from the surface to form a vapor flow, pass through the pattern on the mask plate, and finally A method of forming a patterned thin film by condensation on the substrate to be evaporated. At present, the vacuum evaporation method has been widely used in the preparation of OLED devices. [0003] The evaporation device is used for vacuum evaporation. The evaporation device is generally equipped with a touch plate (TP for short), and the evaporation carrier is used to carry the substrate to be evaporated. The evaporation carrier is used to carry the substrate to be evaporated. One side of th...

Claims

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Application Information

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IPC IPC(8): C23C14/50C23C14/24C23C14/12
CPCC23C14/12C23C14/24C23C14/50
Inventor 刘肖楠宋锐男于森宋裕斌谢飞李坡吕冲曾义红唐富强靳福江安成国
Owner BOE TECH GRP CO LTD
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