Taiko-wafer-based wafer-level packaging structure and method
A technology of wafer-level packaging and drum wafers, which is applied in the field of wafer-level packaging structures based on Taiko wafers, and can solve problems such as unbearable process, too thin central part, and limited application of Taiko wafers.
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[0026] In order to make the present invention more comprehensible, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings. For convenience of description, the components in the structures in the drawings of the embodiments are not scaled according to the normal scale, so they do not represent the actual relative sizes of the structures in the embodiments.
[0027] Such as figure 1 Shown is the flow chart of the method of the embodiment of the present invention, as Figure 2 to Figure 6 Shown is a schematic diagram of the wafer structure after each step in the method of the embodiment of the present invention. The wafer-level packaging method based on the Taiko wafer of the present invention comprises the following steps:
[0028] Step one, see figure 2 , using the Taiko thinning process method to thin the middle part of the back of the wafer to form a Taiko wafer 1, the middle part of the...
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