AFM scanning image hysteresis correction method through hysteresis model based on image

Abstract

The invention discloses an AFM scanning image hysteresis correction method through a hysteresis model based on an image. The method comprises the following steps that 1) the hysteresis model based onthe image is established; 2) the forward scanning image and the reverse scanning image of an atomic force microscope are acquired, and feature point matching is performed on the two images so that sothat the coordinate information of multiple sets of matched feature points can be obtained; 3) the parameters of the hysteresis model are calculated according to the coordinate information of the matched feature points in the two images; and 4) coordinate transformation and reconstruction are performed on the forward scanning image and the reverse scanning image according to the hysteresis model so that the image after hysteresis correction can be obtained. The reasonable and simple hysteresis model based on the scanning image is put forward, and hysteresis correction can be performed by usingthe image obtained by original scanning without reconstructing the hardware of the atomic force microscope so that the cost can be saved and the low-hysteresis and high-quality image can be providedfor the atomic force microscope.

Description

technical field [0001] The invention relates to the technical field of atomic force microscope imaging, in particular to a method for correcting AFM scanning image hysteresis based on an image hysteresis model. Background technique [0002] Most scanning probe microscopes use piezoelectric ceramics as drivers to scan the surface of the sample to obtain three-dimensional topography images, such as tunneling scanning microscopes and atomic force microscopes. However, the errors caused by the nonlinearity caused by the hysteresis of the piezoelectric ceramics seriously affect the quality of the scanned image, resulting in a distorted scanned image. [0003] Piezoelectric hysteresis is a complicated process, and the output is not only related to the current input, but also related to the historical input. Piezoceramic also has erasing properties and consistency. When the atomic force microscope uses piezoelectric ceramics to scan the three-dimensional shape of the sample, the ...

AI Technical Summary

Problems solved by technology

However, in the existing solutions: the feedforward control method has a large amount of calculation, the model parameters are easily affected by the environment, and the accuracy is limited; the feedback control method requires a special fixture to install the sensor, resulting in a complex structure and increased cost; the charge control method requires Special driver with narrow bandwidth and high control difficulty, resulting in complex structure and affecting the effect

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