Polishing method of air spindle
An air spindle and processing method technology, applied in the field of CNC machine tools, can solve the problems of low production efficiency, reduced precision, difficult to smooth surface, etc., to achieve the effect of prolonging service life, reducing friction, and smooth and clean surface
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
Embodiment Construction
[0020] The polishing treatment method of the air spindle of the present invention will be further described in conjunction with the examples below, but the present invention is not limited thereby.
[0021] The polishing treatment method of the air spindle of the present invention comprises the following steps:
[0022] Place the air spindle cleaned by ultrasonic vibration in the plasma reaction chamber;
[0023] adjusting the degree of vacuum in the plasma reaction chamber to a first value;
[0024] Introduce oxygen and argon into the plasma reaction chamber and maintain the vacuum;
[0025] The cathode radio frequency frequency of the plasma reaction chamber is controlled to be 80-100 KHz, and the anode radio frequency frequency is controlled to be 30-35 MHz, so as to realize the first glow discharge.
[0026] Specifically, before the etching gas is introduced, the vacuum degree of the plasma reaction chamber is 550-600 Pa, for example, oxygen gas and argon gas are introdu...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com