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MEMS device and method for producing MEMS device

A suspension and conductive layer technology, applied in the process of producing decorative surface effects, microstructure devices, manufacturing microstructure devices, etc., can solve problems such as insufficient electrode rigidity

Active Publication Date: 2018-06-05
INFINEON TECH AUSTRIA AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This may have the limitation that in particular the layer thickness of nitrides can only be scaled to a limited extent
Increasing the nitride layer from 140nm to 160nm is considered insufficient for enhancing the rigidity of the amplified electrode, and a layer thickness of 300nm may also be insufficient for enhancing the amplified electrode, for example in relation to the film size being sought. electrode rigidity

Method used

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  • MEMS device and method for producing MEMS device
  • MEMS device and method for producing MEMS device
  • MEMS device and method for producing MEMS device

Examples

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Embodiment Construction

[0049] The following detailed description refers to the accompanying drawings, which are shown by way of example by way of illustration of certain details and embodiments in which the invention may be applied in practice.

[0050] The word "exemplary" has the meaning herein as "serving as an example, instance, or illustration." All embodiments or configurations described herein as "exemplary" do not necessarily mean that other embodiments or configurations are preferred or advantageous over other embodiments or configurations.

[0051] The word "on" (which word is used in relation to a deposited material formed on a side or surface) may have the meaning herein that the deposited material may be formed "directly" thereon, i.e. with the Indicates side or surface contact. The word "on" (which word is used in relation to a deposited material formed on a side or surface) may have the meaning here that the deposited material may be formed "directly" with one or more additional laye...

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Abstract

The application relates to a MEMS device and a method for producing the MEMS device. A MEMS device is provided. The MEMS device includes a membrane, and at least one electrode arranged at a distance from the membrane. The at least one electrode includes a layer stack. The layer stack includes a first insulation layer, a first conductive layer arranged thereabove, a second insulation layer arrangedthereabove, a second conductive layer arranged thereabove, and a third insulation layer arranged thereabove.

Description

technical field [0001] The various embodiments generally relate to a MEMS device and a method for manufacturing a MEMS device. Background technique [0002] MEMS devices can be used, for example, as microphones or loudspeakers. Such a MEMS device can, for example, be constructed with a membrane and one or two electrodes, which are also referred to as backplates or backplate electrodes or are denoted by the corresponding English terms "Backplate" or "Backplate-Elektrode". The membrane can be separated from the electrode or both electrodes (respectively) by an air gap. When the membrane vibrates in response to sound waves, the sound is converted to an electrical signal by detecting the changing capacitance between the membrane and the electrode or electrodes, or vice versa. [0003] In the case where the currently realized film size has a diameter in the range of 700 to 900 μm, sufficient electrode rigidity can be ensured by the structure of silicon nitride 140 nm / polysilico...

Claims

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Application Information

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IPC IPC(8): B81B7/02B81C1/00
CPCB81B7/02B81C1/00158B81B2201/0257H04R19/005H04R19/04H04R31/003B81B2203/0127B81C1/00166H04R31/00H04R19/02B81B7/0006B81B2203/04H04R9/08H04R2201/003
Inventor S·乔斯特W·弗里扎S·盖斯勒S·皮尔克
Owner INFINEON TECH AUSTRIA AG