A gravity acceleration sensor

Abstract

The invention discloses a gravitational acceleration sensor which comprises a spring mass block structure, a displacement sensing assembly, an upper cover plate structure and a lower cover plate structure. The spring mass block structure comprises a housing frame, an examining weight and a spring structure, and under constraint of the spring structure, the examining weight moves under the effect of an external force; the displacement sensing assembly comprises a driving period array pole plate and a picking period array pole plate, the position of the driving period array pole plate is opposite to that of the picking period array pole plate in an interlaced way, and a capacitor is formed; and when a gravitational acceleration component parallel to the direction of the driving period arraypole plate or the picking period array pole plate changes, the examining weight moves so that the area of the pole plates opposite to each other of the capacitor changes, the change quantity of the capacitor is detector to determine the change quality of the gravitational acceleration component in the direction, and when the gravitational acceleration sensor works in the direction of axis-Z, sagging displacement of the examining weight includes one or more array period(s) under the effect of the gravity. Thus, three-component gravity measurement can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement physics, and more particularly, relates to a gravitational acceleration sensor. Background technique [0002] Gravitational acceleration sensor is a kind of precision gravity measurement sensor that measures the small change of gravitational acceleration. The gravitational acceleration sensor is different from the acceleration sensor used for motion sensing in the field of consumer electronics and the acceleration sensor used for vibration monitoring in the field of industrial control. The fundamental difference lies in the different amplitudes of range, resolution and bias stability. The range of acceleration sensors used for motion sensing and vibration monitoring is generally 1-100g, the resolution is 1mg, and there is basically no requirement for bias stability; while the range of gravitational acceleration sensors is generally 1mg, resolution It is of the order of 1ng (about 1μ...

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Problems solved by technology

[0004] For the defects of the prior art, the object of the present invention is to provide a micro-electromechanical acceleration of gravity sensor, which aims to solve the problems of high manufacturing cost and long manufacturing cycle of the traditional acceleration of gravity sensor, and solve the problem of low resolution of the existing MEMS acceleration of gravity sensor And the technical problem that the three-component gravity measurement cannot be realized

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