A self-mixing interference quadrature detection vibration measurement device and method

A self-mixing interference and quadrature detection technology, which can be used in measuring devices, measuring ultrasonic/sonic/infrasonic waves, and utilizing wave/particle radiation, etc., can solve the problems of low resolution and increased system cost, and improve the demodulation accuracy. , high displacement resolution, the effect of simplifying the difficulty of demodulation

Inactive Publication Date: 2019-06-25
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] In order to overcome the defects in the prior art, the object of the present invention is to provide a self-mixing interference quadrature detection vibration measurement device and method, which solves the problem that the resolution of the existing self-mixing measurement device and method is not high, and the improvement of the resolution leads to system cost Technical issues such as greatly improved

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  • A self-mixing interference quadrature detection vibration measurement device and method
  • A self-mixing interference quadrature detection vibration measurement device and method
  • A self-mixing interference quadrature detection vibration measurement device and method

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[0025] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0026] Such as figure 1 As shown, the self-mixing interference quadrature detection vibration measurement device of an embodiment of the present invention includes a single-mode semiconductor laser diode 1, an adjustable constant current source 2, a first focusing mirror 31, a beam splitter 4, and a first photodiode 51 , a first photoelectric detection module 61, a second focusing mirror 32, a second photodiode 52, a second photoelectric detection module 62, and an acquisition module 7;

[0027] The adjustable constant current source 2 controls the single-mode semiconductor laser diod...

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Abstract

The invention discloses a self-mixing interference quadrature detection vibration measurement device and method. An adjustable constant current source controls a single-mode semiconductor laser diode to output incident laser light, and a part of the incident laser light is reflected to a second photodiode to convert the optical signal The current signal is fed back to the acquisition module after being detected by the second photoelectric detection module; the other part of the incident laser light is irradiated on the surface of the measured object and reflected back to the first photodiode according to the original path, and the optical signal is converted into a current signal by the first The photoelectric detection module feeds back to the acquisition module after detection. Compared with the traditional self-mixing measurement device, the self-mixing interference quadrature detection vibration measurement device of the present application can obtain orthogonal self-mixing signals and complete arctangent demodulation of vibration signals, which simplifies the demodulation of system signals It has higher displacement resolution, improves the demodulation accuracy of the vibration signal of the system, and can realize real-time and online measurement.

Description

technical field [0001] The invention relates to the technical field of laser measurement, in particular to a self-mixing interference quadrature detection vibration measurement device and method. Background technique [0002] Laser self-mixing interference refers to the phenomenon that after the output light of the laser is reflected or scattered by external objects, part of the light is fed back into the laser resonator, and the output power of the laser is modulated, causing the output power of the laser to change, also known as the laser feedback phenomenon. By analyzing the change of laser output power, the information of external objects can be obtained. A laser is both a light source and a detector. Compared with the traditional two-beam interference system, the interference system based on the laser self-mixing phenomenon has only one optical channel, which has the advantages of simple structure, compactness, and easy alignment. It is currently widely used in paramet...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H9/00
CPCG01H9/00
Inventor 武俊峰舒风风李彦呈吴一辉
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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