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A mask integration frame and its manufacturing method

A manufacturing method and frame technology, which is applied in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve the problems of increased cost, unclean mask integrated frame cleaning, mask wrinkle and warpage, etc., to achieve The effect of reducing production costs

Active Publication Date: 2019-12-31
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Embodiments of the present invention provide a mask integration frame and its manufacturing method, which can solve the problem of wrinkling, warping, replacement or repair of the mask sheet caused by the offset of the relative positions of the support bar and the shielding bar and the mask sheet in the prior art Cost increase caused by support bars and shielding bars, the relative position of support bars, shielding bars and the mask cannot be adjusted, and the cleaning of the mask integration frame is not clean

Method used

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  • A mask integration frame and its manufacturing method
  • A mask integration frame and its manufacturing method
  • A mask integration frame and its manufacturing method

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Embodiment Construction

[0037] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0038] An embodiment of the present invention provides a mask integration frame, as shown in FIG. The frame 101 and the second frame 102 are fixedly connected by sheathing; it also includes a plurality of mask sheets 301, as shown in FIG. The opposite ends of the mask sheet 301 are fixed on the first frame 101; the shielding strip 201 and / or the supporting strip 202, as shown in FIG. 2( a), the shielding strip 201 and / or the supporting strip 202 straddle the s...

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Abstract

Embodiments of the present invention provide a mask integration frame and a manufacturing method thereof, which relate to the field of evaporation technology, and can solve the problems caused by mask folds and warpage, replacement or repair of support bars and shielding bars in the prior art. And the relative position of the shielding bar and the mask cannot be adjusted, and the mask integrated frame cannot be cleaned. It includes: a first frame and a second frame, both of which have a hollow area, and the first frame and the second frame are fixedly connected by sleeve; a plurality of mask sheets, and a plurality of mask sheets are sequentially set across In the hollow area of ​​the first frame, and the opposite ends of the mask sheet are fixed on the first frame; the shielding strip and / or the supporting strip, the shielding strip and / or the supporting strip straddle the hollow area of ​​the second frame, and shield The opposite ends of the bar and / or the support bar are fixed on the second frame; wherein, the shielding bar is located in the gap between adjacent mask sheets, and the support bar spans the invalid mask area of ​​the plurality of mask sheets to support multiple a mask.

Description

technical field [0001] The invention relates to the field of vapor deposition technology, in particular to a mask integrated frame and a manufacturing method thereof. Background technique [0002] Currently, the OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) display panel has been more and more widely used due to its advantages of self-illumination, fast response, high brightness, and thinness. [0003] Wherein, the light-emitting layer in the OLED display panel can be formed by using a fine metal mask (Fine Metal Mask, FMM for short) and through an evaporation process. The fine metal mask board includes a plurality of mask sheets (FMM Sheet), and the mask sheet is provided with a mask pattern. During the evaporation process, multiple mask sheets need to be welded on the frame (Frame) to make a mask. Membrane integration framework (Mask Frame Assembly, MFA) to use. The mask integration frame may further include cover bars arranged between adjacent mask s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/00
Inventor 罗昶吴建鹏
Owner BOE TECH GRP CO LTD
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